• 1566 Citations

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  • 2 Invited talk
  • 1 Contributed talk
Contributed talk

New Process Concepts Towards Area-Selective Atomic Layer Deposition and Atomic Layer Etching of Zinc Oxide

A. Mameli (Member), , M.A. Verheijen (Member), , B. Karasulu (Member), , A.J.M. Mackus (Member), , W.M.M. Kessels (Member), & F. Roozeboom (Speaker)

30 Sep 20184 Oct 2018

Activity: Talk or presentation typesContributed talkScientific