• 1488 Citations
20072020

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  • 2 Invited talk
  • 1 Contributed talk
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Contributed talk

New Process Concepts Towards Area-Selective Atomic Layer Deposition and Atomic Layer Etching of Zinc Oxide

A. Mameli (Member), M.A. Verheijen (Member), B. Karasulu (Member), A.J.M. Mackus (Member), W.M.M. Kessels (Member), F. Roozeboom (Speaker)
30 Sep 20184 Oct 2018

Activity: Talk or presentation typesContributed talkScientific