• 1566 Citations
20072020

Research output per year

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Activities

  • 2 Invited talk
  • 1 Contributed talk

New Process Concepts Towards Area-Selective Atomic Layer Deposition and Atomic Layer Etching of Zinc Oxide

A. Mameli (Member), , M.A. Verheijen (Member), , B. Karasulu (Member), , A.J.M. Mackus (Member), , W.M.M. Kessels (Member), & F. Roozeboom (Speaker)

30 Sep 20184 Oct 2018

Activity: Talk or presentation typesContributed talkScientific

Atomic Layer Etching of ZnO on 2D and 3D substrates, using acetylacetone and O2 plasma

A. Mameli (Member), , M.A. Verheijen (Member), , B. Karasulu (Member), , A.J.M. Mackus (Member), , W.M.M. Kessels (Member), & F. Roozeboom (Invited speaker)

24 Jul 201828 Jul 2018

Activity: Talk or presentation typesInvited talkScientific

Overview of approaches for achieving area-selective ALD

A.J.M. Mackus (Invited speaker)

29 Apr 20181 May 2018

Activity: Talk or presentation typesInvited talkScientific