Activities per year
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Search results
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New Process Concepts Towards Area-Selective Atomic Layer Deposition and Atomic Layer Etching of Zinc Oxide
Mameli, A. (Member), Verheijen, M. A. (Member), Karasulu, B. (Member), Mackus, A. J. M. (Member), Kessels, W. M. M. (Member) & Roozeboom, F. (Speaker)
30 Sept 2018 → 4 Oct 2018Activity: Talk or presentation types › Contributed talk › Scientific
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Atomic Layer Etching of ZnO on 2D and 3D substrates, using acetylacetone and O2 plasma
Mameli, A. (Member), Verheijen, M. A. (Member), Karasulu, B. (Member), Mackus, A. J. M. (Member), Kessels, W. M. M. (Member) & Roozeboom, F. (Invited speaker)
24 Jul 2018 → 28 Jul 2018Activity: Talk or presentation types › Invited talk › Scientific
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Overview of approaches for achieving area-selective ALD
Mackus, A. J. M. (Invited speaker)
29 Apr 2018 → 1 May 2018Activity: Talk or presentation types › Invited talk › Scientific