• 1439 Citations
20072020

Research output per year

If you made any changes in Pure these will be visible here soon.

Personal profile

Research profile

Adriaan J.M. Mackus is Assistant Professor in the Plasma and Materials Processing group within the Applied Physics department at Eindhoven University of Technology (TU/e). His research encompasses thin film deposition and etching for applications in nanoelectronics, with a focus on selective processing for bottom-up fabrication.  

Academic background

Adrie Mackus earned his M.Sc. and Ph.D. degrees (both cum laude) in Applied Physics at Eindhoven University of Technology TU/e in 2009 and 2013, respectively. His doctoral thesis work “Atomic Layer Deposition of Platinum: From Surface Reactions to Nanopatterning” was carried out in close collaboration with the company FEI Electron Optics, and included a visit to Purdue University, USA in 2012.  Mackus worked as a postdoctoral researcher at the department of Chemical Engineering at Stanford University from 2014 to 2016, for which he received a personal NWO Rubicon grant in 2014. At Stanford, he focused on the study of the atomic layer deposition (ALD) of ternary materials using in-situ techniques. After his postdoc, Mackus returned to TU/e in 2016 as Assistant Professor. Adrie is a founding member of the Early Career Investigator (ECI) network within COST action HERALD and chaired the 2nd Area Selective Deposition workshop (ASD2017) in Eindhoven in 2017.

Fingerprint Dive into the research topics where Adrie Mackus is active. These topic labels come from the works of this person. Together they form a unique fingerprint.

  • 3 Similar Profiles

Network Recent external collaboration on country level. Dive into details by clicking on the dots.

Research Output

From the bottom-up: toward area-selective atomic layer deposition with high selectivity

Mackus, A. J. M., Merkx, M. J. M. & Kessels, W. M. M., 8 Jan 2019, In : Chemistry of Materials. 31, 1, p. 2-12 11 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
  • 23 Citations (Scopus)
    266 Downloads (Pure)

    Area-selective atomic layer deposition of SiO2 using acetylacetone as a chemoselective inhibitor in an ABC-type cycle

    Mameli, A., Merkx, M. J. M., Karasulu, B., Roozeboom, F., Kessels, W. M. M. & MacKus, A. J. M., 26 Sep 2017, In : ACS Nano. 11, 9, p. 9303-9311 9 p.

    Research output: Contribution to journalArticleAcademicpeer-review

    Open Access
    File
  • 33 Citations (Scopus)
    225 Downloads (Pure)

    Synthesis of doped, ternary, and quaternary materials by atomic layer deposition: a review

    Mackus, A., Schneider, J. R., MacIsaac, C., Baker, J. G. & Bent, S. F., 26 Feb 2019, In : Chemistry of Materials. 31, 4, p. 1142-1183 42 p.

    Research output: Contribution to journalArticleAcademicpeer-review

  • 18 Citations (Scopus)
    2 Downloads (Pure)

    Mechanism of precursor blocking by acetylacetone inhibitor molecules during area-selective atomic layer deposition of SiO2

    Merkx, M. J. M., Sandoval, T. E., Hausmann, D. M., Kessels, W. M. M. E. & Mackus, A. J. M., 12 Feb 2020, (Accepted/In press) In : Chemistry of Materials.

    Research output: Contribution to journalArticleAcademicpeer-review

  • Synthesis of a hybrid nanostructure of ZnO-decorated MoS2 by atomic layer deposition

    Oh, I. K., Kim, W. H., Zeng, L., Singh, J., Bae, D., Mackus, A. J. M., Song, J. G., Seo, S., Shong, B., Kim, H. & Bent, S. F., 25 Feb 2020, In : ACS Nano. 14, 2, p. 1757-1769 13 p.

    Research output: Contribution to journalArticleAcademicpeer-review

    Prizes

    Paul H. Holloway Award

    Adrie Mackus (Recipient), 22 Oct 2019

    Prize: OtherCareer, activity or publication related prizes (lifetime, best paper, poster etc.)Scientific

    Activities

    • 2 Invited talk
    • 1 Contributed talk

    New Process Concepts Towards Area-Selective Atomic Layer Deposition and Atomic Layer Etching of Zinc Oxide

    A. Mameli (Member), M.A. Verheijen (Member), B. Karasulu (Member), A.J.M. Mackus (Member), W.M.M. Kessels (Member), F. Roozeboom (Speaker)
    30 Sep 20184 Oct 2018

    Activity: Talk or presentation typesContributed talkScientific

    Atomic Layer Etching of ZnO on 2D and 3D substrates, using acetylacetone and O2 plasma

    A. Mameli (Member), M.A. Verheijen (Member), B. Karasulu (Member), A.J.M. Mackus (Member), W.M.M. Kessels (Member), F. Roozeboom (Invited speaker)
    24 Jul 201828 Jul 2018

    Activity: Talk or presentation typesInvited talkScientific

    Overview of approaches for achieving area-selective ALD

    A.J.M. Mackus (Invited speaker)
    29 Apr 20181 May 2018

    Activity: Talk or presentation typesInvited talkScientific

    Courses

    Applied natural sciences formal

    1/09/12 → …

    Course

    Electromagnetism

    1/09/12 → …

    Course

    Impacts

    Advanced ALD technologies

    M. (Adriana) Creatore (Researcher), W.M.M. (Erwin) Kessels (Researcher), Adrie Mackus (Researcher)

    Impact: Research Topic/Theme (at group level)

    Future nanoelectronics and nanopatterning

    Ageeth A. Bol (Researcher), W.M.M. (Erwin) Kessels (Researcher), Adrie Mackus (Content manager)

    Impact: Research Topic/Theme (at group level)

    Student theses

    Area-selective atomic layer deposition using inhibitor molecules in multi-step cycles

    Author: Jongen, R. G., 2018

    Supervisor: Merkx, M. J. (Supervisor 1) & Mackus, A. J. (Supervisor 2)

    Student thesis: Master

    File

    Atomic layer deposition and electron beam induced deposition as nanomanufacturing tools for the fabrication of carbon nanotube contacts

    Author: Dielissen, S., 31 Aug 2011

    Supervisor: Mackus, A. (Supervisor 1), Fernández Landaluce, T. (External coach) & Kessels, W. (Supervisor 2)

    Student thesis: Master

    File

    Atomic layer deposition of Pt and its combination with electron beam induced deposition for the fabrication of nanostructures

    Author: Mackus, A., 30 Apr 2009

    Supervisor: Knoops, H. (Supervisor 1), Mulders, J. (External coach) & Kessels, W. (Supervisor 2)

    Student thesis: Master

    File

    Direct-write atomic layer deposition for the fabrication of carbon nanotube field-effect transistors

    Author: Thissen, N., 31 Oct 2012

    Supervisor: Mackus, A. (Supervisor 1), Bol, A. (Supervisor 2) & Kessels, W. (Supervisor 2)

    Student thesis: Master

    File