Projects per year
Personal profile
Research profile
Adriaan J.M. Mackus is Associate Professor in the Plasma and Materials Processing group within the Applied Physics department at Eindhoven University of Technology (TU/e). His research encompasses thin film deposition and etching for applications in nanoelectronics, with a focus on selective processing for bottom-up fabrication.
Academic background
Adrie Mackus earned his M.Sc. and Ph.D. degrees (both with highest honors) in Applied Physics from TU/e in 2009 and 2013, respectively. Adrie worked as a postdoc at the department of Chemical Engineering at Stanford University in 2014-2016. He returned to TU/e in 2016, where he received tenure in 2019. His current research encompasses atomic layer deposition (ALD) and etching (ALE) for applications in nanoelectronics, with a focus on selective processing for bottom-up fabrication. This involves application-oriented projects funded by industrial partners, as well as fundamental studies of the underlying mechanisms using in-situ techniques. Adrie chaired the 2nd Area Selective Deposition workshop (ASD2017) in Eindhoven in 2017. In 2020 he was awarded a VIDI grant from the Netherlands Organization of Scientific Research (NWO) and a Starting Grant from the European Research Council (ERC).
Expertise related to UN Sustainable Development Goals
In 2015, UN member states agreed to 17 global Sustainable Development Goals (SDGs) to end poverty, protect the planet and ensure prosperity for all. This person’s work contributes towards the following SDG(s):
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Collaborations and top research areas from the last five years
Projects
- 2 Active
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TKI-HTSM/24.0176 - ASPEA: Atomic-Scale Processing Equipment for the Ångstrom Era
Mackus, A. J. M. (Project Manager), Macco, B. (Project member), Kessels, W. M. M. (Project member), Lam, C. H. X. (Project member), Vacancy PD (Project member), van Gurp, M. C. (Project member), KG Krieger, G. (Project member) & Vacancy PHD (Project member)
1/01/24 → 31/12/29
Project: Third tier
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TKI HTSM/23.0534 - ESPRO: Patterning of 2D materials by EUV and area-selective processing
Mackus, A. J. M. (Project Manager) & D'Acunto, G. (Project member)
1/01/23 → 16/10/28
Project: Third tier
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From the bottom-up: toward area-selective atomic layer deposition with high selectivity
Mackus, A. J. M. (Corresponding author), Merkx, M. J. M. & Kessels, W. M. M., 8 Jan 2019, In: Chemistry of Materials. 31, 1, p. 2-12 11 p.Research output: Contribution to journal › Article › Academic › peer-review
Open AccessFile308 Citations (Scopus)967 Downloads (Pure) -
Area-selective atomic layer deposition of SiO2 using acetylacetone as a chemoselective inhibitor in an ABC-type cycle
Mameli, A., Merkx, M. J. M., Karasulu, B., Roozeboom, F., Kessels, W. M. M. & MacKus, A. J. M., 26 Sept 2017, In: ACS Nano. 11, 9, p. 9303-9311 9 p.Research output: Contribution to journal › Article › Academic › peer-review
Open AccessFile164 Citations (Scopus)632 Downloads (Pure) -
Synthesis of doped, ternary, and quaternary materials by atomic layer deposition: a review
Mackus, A., Schneider, J. R., MacIsaac, C., Baker, J. G. & Bent, S. F. (Corresponding author), 26 Feb 2019, In: Chemistry of Materials. 31, 4, p. 1142-1183 42 p.Research output: Contribution to journal › Article › Academic › peer-review
223 Citations (Scopus)2 Downloads (Pure) -
Investigation of the atomic layer etching mechanism for Al2O3 using hexafluoroacetylacetone and H2 plasma
Chittock, N., Maas, J. F. W., Tezsevin, I., Merkx, M. J. M., Knoops, H. C. M., Kessels, W. M. M. & Mackus, A. J. M. (Corresponding author), 21 Jan 2025, In: Journal of Materials Chemistry C. 13, 3, p. 1345-1358 14 p.Research output: Contribution to journal › Article › Academic › peer-review
Open AccessFile23 Downloads (Pure) -
Topographically selective atomic layer deposition within trenches enabled by an amorphous carbon inhibition layer
Janssen, T., Vossen, L. J. P., Verheijen, M. A., Kessels, W. M. M. & Mackus, A. J. M. (Corresponding author), 10 Feb 2025, In: Applied Physics Letters. 126, 6, 6 p., 063505.Research output: Contribution to journal › Article › Academic › peer-review
Open AccessFile4 Downloads (Pure)
Datasets
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Supporting information
Merkx, M. J. M. (Creator), Tezsevin, I. (Creator), Yu, P. (Creator), Janssen, T. (Creator), Heinemans, R. H. G. M. (Creator), Lengers, R. J. (Creator), Chen, J.-R. (Creator), Jezewski, C. J. (Creator), Clendenning, S. B. (Creator), Kessels, W. M. M. (Creator), Sandoval, T. E. (Creator) & Mackus, A. J. M. (Creator), AIP Publishing, 22 May 2024
DOI: 10.60893/figshare.jcp.25743183, https://aip.figshare.com/articles/dataset/Supporting_information/25743183 and one more link, https://aip.figshare.com/articles/dataset/Supporting_information/25743183/1 (show fewer)
Dataset
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Supplementary Material
Deijkers, J. H. (Creator), Thepass, H. (Creator), Verheijen, M. A. (Creator), Sprey, H. (Creator), Maes, J. W. (Creator), Kessels, W. M. M. (Creator) & Mackus, A. J. M. (Creator), AIP Publishing, 2024
DOI: 10.60893/figshare.jva.27111202.v1, https://aip.figshare.com/articles/dataset/Supplementary_Material/27111202/1 and one more link, https://aip.figshare.com/articles/dataset/Supplementary_Material/27111199/1 (show fewer)
Dataset
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Data underlying the publication: Computational Investigation of Precursor Blocking during Area-Selective Atomic Layer Deposition Using Aniline as a Small-Molecule Inhibitor
Tezsevin, I. (Creator), Maas, J. F. W. (Contributor), Merkx, M. J. M. (Creator), Lengers, R. J. (Creator), Kessels, W. M. M. (Creator), Sandoval, T. E. (Creator) & Mackus, A. J. M. (Creator), 4TU.Centre for Research Data, 7 Aug 2023
DOI: 10.4121/0bb03d8b-d1ac-49bc-8010-a498a981cf3e.v1, https://data.4tu.nl/datasets/0bb03d8b-d1ac-49bc-8010-a498a981cf3e/1 and one more link, https://data.4tu.nl/datasets/0bb03d8b-d1ac-49bc-8010-a498a981cf3e (show fewer)
Dataset
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Data underlying the publication: Blocking mechanisms in area-selective ALD by small molecule inhibitors of different sizes: Steric shielding versus chemical passivation
Yu, P. (Creator), Merkx, M. J. M. (Creator), Tezsevin, I. (Creator), Lemaire, P. C. (Creator), Hausmann, D. M. (Creator), Sandoval, T. E. (Creator), Kessels, W. M. M. (Creator) & Mackus, A. J. M. (Creator), 4TU.Centre for Research Data, 2 May 2024
DOI: 10.4121/c357264b-f395-4409-bedc-328f45f6e6ac, https://data.4tu.nl/datasets/c357264b-f395-4409-bedc-328f45f6e6ac and 2 more links, https://data.4tu.nl/datasets/c357264b-f395-4409-bedc-328f45f6e6ac/1, https://data.4tu.nl/datasets/c357264b-f395-4409-bedc-328f45f6e6ac/2 (show fewer)
Dataset
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Data underlying the publication: Packing of inhibitor molecules during area-selective atomic layer deposition studied using random sequential adsorption simulations
Li, J. (Creator), Tezsevin, I. (Creator), Merkx, M. J. M. (Creator), Maas, J. F. W. (Creator), Kessels, W. M. M. (Creator), Sandoval, T. E. (Creator) & Mackus, A. J. M. (Creator), 4TU.Centre for Research Data, 7 Aug 2023
DOI: 10.4121/33df3424-ed9b-49cb-910e-64a6d37aa6b0, https://data.4tu.nl/datasets/33df3424-ed9b-49cb-910e-64a6d37aa6b0 and one more link, https://data.4tu.nl/datasets/33df3424-ed9b-49cb-910e-64a6d37aa6b0/1 (show fewer)
Dataset
Prizes
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Paul H. Holloway Award
Mackus, A. (Recipient), 22 Oct 2019
Prize: Other › Career, activity or publication related prizes (lifetime, best paper, poster etc.) › Scientific
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From the bottom-up: a physico-chemical approach towards 3D nanostructures with atomic-scale control
Mackus, A. J. M. (Recipient), 1 Jan 2020
Prize: ERC › Starting › Scientific
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Towards bottom-up fabrication of nanoelectronics: understanding and advancing area-selective atomic layer deposition
Mackus, A. J. M. (Recipient), 1 Jan 2020
Prize: NWO › Vidi › Scientific
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New Process Concepts Towards Area-Selective Atomic Layer Deposition and Atomic Layer Etching of Zinc Oxide
Mameli, A. (Member), Verheijen, M. A. (Member), Karasulu, B. (Member), Mackus, A. J. M. (Member), Kessels, W. M. M. (Member) & Roozeboom, F. (Speaker)
30 Sept 2018 → 4 Oct 2018Activity: Talk or presentation types › Contributed talk › Scientific
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Atomic Layer Etching of ZnO on 2D and 3D substrates, using acetylacetone and O2 plasma
Mameli, A. (Member), Verheijen, M. A. (Member), Karasulu, B. (Member), Mackus, A. J. M. (Member), Kessels, W. M. M. (Member) & Roozeboom, F. (Invited speaker)
24 Jul 2018 → 28 Jul 2018Activity: Talk or presentation types › Invited talk › Scientific
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Overview of approaches for achieving area-selective ALD
Mackus, A. J. M. (Invited speaker)
29 Apr 2018 → 1 May 2018Activity: Talk or presentation types › Invited talk › Scientific
Courses
Press/Media
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Investigators at Eindhoven University of Technology Discuss Findings in Applied Physics [Isotropic Atomic Layer Etching of Gan Using Sf6 Plasma and Al(Ch3)(3)]
Knoops, H. C. M. & Mackus, A. J. M.
22/09/23
1 item of Media coverage
Press/Media: Expert Comment
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Recent Studies from Eindhoven University of Technology Add New Data to Atomic Layer Deposition (Mos2 Synthesized By Atomic Layer Deposition As Cu Diffusion Barrier)
Mackus, A. J. M., Verheijen, M. A., Schulpen, J. J. P. M., Mattinen, M., de Jong, A. A. & Deijkers, J. H.
28/04/23
1 item of Media coverage
Press/Media: Expert Comment
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Investigators from Eindhoven University of Technology Release New Data on Atomic Layer Deposition (Surface Smoothing By Atomic Layer Deposition and Etching for the Fabrication of Nanodevices)
Knoops, H. C. M., Mackus, A. J. M. & Verheijen, M. A.
3/01/23
1 item of Media coverage
Press/Media: Expert Comment
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2D TMD Materials Enabling Future Electronics
Balasubramanyam, S., Merkx, M. J. M., Verheijen, M. A., Kessels, W. M. M., Mackus, A. J. M. & Bol, A. A.
27/06/21
1 Media contribution
Press/Media: Expert Comment
Research areas
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Advanced ALD technologies
Creatore, M. (Researcher), Kessels, W. M. M. (Researcher) & Mackus, A. J. M. (Researcher)
Impact: Research Topic/Theme (at group level)
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Future nanoelectronics and nanopatterning
Bol, A. A. (Researcher), Kessels, W. M. M. (Researcher) & Mackus, A. J. M. (Content manager)
Impact: Research Topic/Theme (at group level)
Thesis
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Atomic layer deposition of Pt and its combination with electron beam induced deposition for the fabrication of nanostructures
Mackus, A. J. M. (Author), Knoops, H. C. M. (Supervisor 1), Mulders, J. J. L. (External coach) & Kessels, W. M. M. (Supervisor 2), 30 Apr 2009Student thesis: Master
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