Scientific Computing

  • AddressShow on map

    Groene Loper 5, Department of Mathematics and Computer Science

    5612 AP Eindhoven

    Netherlands

  • Postal addressShow on map

    P.O. Box 513, Metaforum

    5600 MB Eindhoven

    Netherlands

Filter
Patent publication

Search results

  • 2006

    Method and apparatus for angular-resolved spectroscopic lithography characterization

    Boef, den, A. J. (Inventor), Bleeker, A. J. (Inventor), Dommelen, van, Y. J. L. M. (Inventor), Dusa, M. (Inventor), Kiers, A. G. M. (Inventor), Lührmann, P. F. (Inventor), Pellemans, H. P. M. (Inventor), van der Schaar, M. (Inventor), Grouwstra, C. D. (Inventor) & Kraaij, van, M. G. M. M. (Inventor), 22 Feb 2006, Patent No. EP1628164 (A2)

    Research output: Patent › Patent publication