Datasets
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Supporting information
Merkx, M. J. M. (Creator), Tezsevin, I. (Creator), Yu, P. (Creator), Janssen, T. (Creator), Heinemans, R. H. G. M. (Creator), Lengers, R. J. (Creator), Chen, J.-R. (Creator), Jezewski, C. J. (Creator), Clendenning, S. B. (Creator), Kessels, W. M. M. (Creator), Sandoval, T. E. (Creator) & Mackus, A. J. M. (Creator), AIP Publishing, 22 May 2024
DOI: 10.60893/figshare.jcp.25743183, https://aip.figshare.com/articles/dataset/Supporting_information/25743183 and one more link, https://aip.figshare.com/articles/dataset/Supporting_information/25743183/1 (show fewer)
Dataset
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Data underlying the publication: Packing of inhibitor molecules during area-selective atomic layer deposition studied using random sequential adsorption simulations
Li, J. (Creator), Tezsevin, I. (Creator), Merkx, M. J. M. (Creator), Maas, J. F. W. (Creator), Kessels, W. M. M. (Creator), Sandoval, T. E. (Creator) & Mackus, A. J. M. (Creator), 4TU.Centre for Research Data, 7 Aug 2023
DOI: 10.4121/33df3424-ed9b-49cb-910e-64a6d37aa6b0, https://data.4tu.nl/datasets/33df3424-ed9b-49cb-910e-64a6d37aa6b0 and one more link, https://data.4tu.nl/datasets/33df3424-ed9b-49cb-910e-64a6d37aa6b0/1 (show fewer)
Dataset
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Data underlying the publication: Computational Investigation of Precursor Blocking during Area-Selective Atomic Layer Deposition Using Aniline as a Small-Molecule Inhibitor
Tezsevin, I. (Creator), Maas, J. F. W. (Contributor), Merkx, M. J. M. (Creator), Lengers, R. J. (Creator), Kessels, W. M. M. (Creator), Sandoval, T. E. (Creator) & Mackus, A. J. M. (Creator), 4TU.Centre for Research Data, 7 Aug 2023
DOI: 10.4121/0bb03d8b-d1ac-49bc-8010-a498a981cf3e.v1, https://data.4tu.nl/datasets/0bb03d8b-d1ac-49bc-8010-a498a981cf3e/1 and one more link, https://data.4tu.nl/datasets/0bb03d8b-d1ac-49bc-8010-a498a981cf3e (show fewer)
Dataset
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Data underlying the publication: Isotropic atomic layer etching of GaN using SF6 plasma and Al(CH3)3
Chittock, N. J. (Creator), Mackus, A. J. M. (Creator), Shu, Y. (Creator), Elliott, S. D. (Creator), Knoops, H. C. M. (Creator) & Kessels, W. M. M. (Creator), 4TU.Centre for Research Data, 21 Aug 2023
DOI: 10.4121/b7383943-2ae0-4339-8cbf-657765023fd6, https://data.4tu.nl/datasets/b7383943-2ae0-4339-8cbf-657765023fd6 and one more link, https://data.4tu.nl/datasets/b7383943-2ae0-4339-8cbf-657765023fd6/1 (show fewer)
Dataset
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Data underlying the publication: Blocking mechanisms in area-selective ALD by small molecule inhibitors of different sizes: Steric shielding versus chemical passivation
Yu, P. (Creator), Merkx, M. J. M. (Creator), Tezsevin, I. (Creator), Lemaire, P. C. (Creator), Hausmann, D. M. (Creator), Sandoval, T. E. (Creator), Kessels, W. M. M. (Creator) & Mackus, A. J. M. (Creator), 4TU.Centre for Research Data, 2 May 2024
DOI: 10.4121/c357264b-f395-4409-bedc-328f45f6e6ac, https://data.4tu.nl/datasets/c357264b-f395-4409-bedc-328f45f6e6ac and 2 more links, https://data.4tu.nl/datasets/c357264b-f395-4409-bedc-328f45f6e6ac/1, https://data.4tu.nl/datasets/c357264b-f395-4409-bedc-328f45f6e6ac/2 (show fewer)
Dataset