• P.O. Box 513, Flux

    5600 MB Eindhoven

    Netherlands

  • Groene Loper 19, Flux

    5612 AP Eindhoven

    Netherlands

Research Output

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Pd Eng Thesis
2015

Electrical characterization of dielectric thin films for MEMS application

Motahari, S., 2015, Eindhoven: Technische Universiteit Eindhoven. 45 p.

Research output: ThesisPd Eng Thesis

1996

Silicon nitride film deposition using a cascaded arc plasma

Paffen, R. M. J. & Technische Universiteit Eindhoven (TUE). Stan Ackermans Instituut. Korte onderzoekersopleiding Technische Natuurkunde, 1996, Eindhoven: Technische Universiteit Eindhoven.

Research output: ThesisPd Eng Thesis