Plasma & Materials Processing

Research output

Research output per year 1965 2021

• 1364 Article
• 813 Conference contribution
• 111 Phd Thesis 1 (Research TU/e / Graduation TU/e)
• 88 Patent publication
• 302 More
  • 83 Other
  • 56 Poster
  • 37 Editorial
  • 26 Chapter
  • 20 Report
  • 17 Abstract
  • 12 Phd Thesis 2 (Research NOT TU/e / Graduation TU/e)
  • 7 Book editing
  • 7 Book
  • 5 Comment/Letter to the editor
  • 4 Inaugural speech
  • 4 Review article
  • 4 Other contribution
  • 3 Foreword/postscript
  • 3 Paper
  • 3 Meeting Abstract
  • 3 Conference article
  • 2 Letter
  • 2 Web publication/site
  • 2 Phd Thesis 4 Research NOT TU/e / Graduation NOT TU/e)
  • 2 Pd Eng Thesis

Research output per year

Research output per year

Search results

• 2021

  About the importance of purge time in molecular layer deposition of alucone films

  Jain, H. & Poodt, P. W. G., 30 Mar 2021, (Accepted/In press) In: Dalton Transactions. XX, XX, 51 p.

  Research output: Contribution to journal › Article › Academic › peer-review

  Open Access

  • Chemical vapor deposition
  • Deposition rates
  • Infiltration
  • Degassing
  • Ethylene Glycol

• A silicon carbide-based highly transparent passivating contact for crystalline silicon solar cells approaching efficiencies of 24%

  Köhler, M., Pomaska, M., Procel, P., Techn, D. U., Zamchiy, A., Macco, B., Lambertz, A., Duan, W., Cao, P., Klingebiel, B., Li, S., Eberst, A., Luysberg, M., Qiu, K., Isabella, O., Finger, F., Kirchartz, T., Rau, U. & Ding, K., 15 Apr 2021, (Accepted/In press) In: Nature Energy. XX, XX, 11 p.

  Research output: Contribution to journal › Article › Academic › peer-review

  Open Access

  • silicon carbide
  • Silicon solar cells
  • indium tin oxide
  • Passivation
  • Silicon carbide

• Atomic layer deposition of LiF using LiN(SiMe3)2 and SF6 plasma

  Hornsveld, N., Kessels, W. M. M., Synowicki, R. A. & Creatore, M., 29 Mar 2021, (Accepted/In press) In: Physical Chemistry Chemical Physics. XX, XX, 13 p.

  Research output: Contribution to journal › Article › Academic › peer-review

  Open Access

  • Lithium Fluoride
  • Atomic layer deposition
  • atomic layer epitaxy
  • Plasmas
  • lithium fluoride

• Conformal Growth of Nanometer-Thick Transition Metal Dichalcogenide TiSx‑NbSx Heterostructures over 3D Substrates by Atomic Layer Deposition: Implications for Device Fabrication

  Basuvalingam, S. B., Bloodgood, M., Netherlands, E. M. S. N. BV. AE. E., Kessels, W. M. M. & Bol, A. A., 4 Jan 2021, In: ACS Applied Nano Materials. 4, 1, p. 514-521 8 p.

  Research output: Contribution to journal › Article › Academic › peer-review

  Open Access

  • Atomic layer deposition
  • Transition metals
  • Heterojunctions
  • Fabrication
  • Substrates

• Dependence of inherent selective atomic layer deposition of FeO_xon Pt nanoparticles on the coreactant and temperature

  Cai, J., Merkx, M. J. M., Lan, Y., Jing, Y., Cao, K., Wen, Y., Kessels, W. M. M., MacKus, A. J. M. & Chen, R., 1 Jan 2021, In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 39, 1, 7 p., 012404.

  Research output: Contribution to journal › Article › Academic › peer-review

  • Atomic layer deposition
  • atomic layer epitaxy
  • Nanoparticles
  • selectivity
  • nanoparticles

• Electrochemical Activation of Atomic Layer-Deposited Cobalt Phosphate Electrocatalysts for Water Oxidation

  Zhang, R., van Straaten, G., Di Palma, V., Zafeiropoulos, G., van de Sanden, M. C. M., Kessels, W. M. M., Tsampas, M. N. & Creatore, M., 15 Feb 2021, In: ACS Catalysis. 11, 5, p. 2774-2785 12 p.

  Research output: Contribution to journal › Article › Academic › peer-review

  Open Access

  • Electrocatalysts
  • Cobalt
  • Phosphates
  • Chemical activation
  • Oxidation

• Enhancing separation efficiency in European syngas industry by using zeolites

  Luna-Triguero, A., Vicent-Luna, J. M., Jansman, M. J., Zafeiropoulos, G., Tsampas, M. N., van de Sanden, M. C. M., Akse, H. N. & Calero, S., 15 Feb 2021, In: Catalysis Today. 362, p. 113-121 9 p.

  Research output: Contribution to journal › Article › Academic › peer-review

  • Zeolites
  • Carbon Monoxide
  • Purification
  • Carbon Dioxide
  • Carbon dioxide
  1 Citation (Scopus)

• Excellent Passivation of n‐Type Silicon Surfaces Enabled by Pulsed‐Flow Plasma‐Enhanced Chemical Vapor Deposition of Phosphorus Oxide Capped by Aluminum Oxide

  Melskens, J., Theeuwes, R. J., Black, L. E., Berghuis, W-J. H., Macco, B., Bronsveld, P. C. P. & Kessels, W. M. M., Jan 2021, In: Physica Status Solidi : Rapid Research Letters. 15, 1, 6 p., 2000399.

  Research output: Contribution to journal › Article › Academic › peer-review

  Open Access

  • phosphorus oxides
  • Aluminum Oxide
  • Silicon
  • Passivation
  • Phosphorus

• Improved AlScN/GaN heterostructures grown by metal-organic chemical vapor deposition

  Manz, C., Leone, S., Kirste, L., Ligl, J., Frei, K., Fuchs, T., Prescher, M., Waltereit, P., Verheijen, M. A., Graff, A., Simon-Najasek, M., Altmann, F., Fiederle, M. & Ambacher, O., Mar 2021, In: Semiconductor Science and Technology. 36, 3, 9 p., 034003.

  Research output: Contribution to journal › Article › Academic › peer-review

  Open Access

  • Organic Chemicals
  • Organic chemicals
  • Heterojunctions
  • Chemical vapor deposition
  • high electron mobility transistors

• Improved Pd/CeO2 Catalysts for Low-Temperature NO Reduction: Activation of CeO2 Lattice Oxygen by Fe Doping

  Zhang, L., Spezzati, G., Muravev, V., Verheijen, M. A., Zijlstra, B., Filot, I. A. W., Su, Y-Q., Chang, M-W. & Hensen, E. J. M., 2021, (Accepted/In press) In: ACS Catalysis. XX, XX

  Research output: Contribution to journal › Article › Academic › peer-review

• Insight into the removal and reapplication of small inhibitor molecules during area-selective atomic layer deposition of SiO2

  Merkx, M. J. M., Jongen, R. G. J., Mameli, A., Lemaire, P. C., Sharma, K., Hausmann, D. M., Kessels, W. M. M. & Mackus, A. J. M., Jan 2021, In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces, and Films. 39, 1, 8 p., 012402.

  Research output: Contribution to journal › Article › Academic › peer-review

  • Atomic layer deposition
  • inhibitors
  • atomic layer epitaxy
  • Molecules
  • Plasmas
  1 Citation (Scopus)

• Oxygen Recombination Probability Data for Plasma-Assisted Atomic Layer Deposition of SiO2 and TiO2

  Arts, K., Deijkers, J. H., Puurunen, R. L., Kessels, W. M. M. & Knoops, H. C. M., 8 Apr 2021, (Accepted/In press) In: Journal of Physical Chemistry C. 9 p.

  Research output: Contribution to journal › Article › Academic › peer-review

  Open Access

  • TiO2-SiO2
  • oxygen recombination
  • Atomic layer deposition
  • atomic layer epitaxy
  • Plasmas

• Preface for the AVS Peter Mark award 40th anniversary collection

  Aydil, E. S., Kessels, W. M. M., Law, S., Sankaran, M. & Zide, J. M. O., 1 May 2021, In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces, and Films. 39, 3, 4 p., 031601.

  Research output: Contribution to journal › Article › Academic › peer-review

• Reaction Mechanisms during Atomic Layer Deposition of AlF₃Using Al(CH₃)₃and SF₆Plasma

  Vos, M. F. J., Knoops, H. C. M., Kessels, W. M. M. & MacKus, A. J. M., 10 Feb 2021, In: Journal of Physical Chemistry C. 125, 7, p. 3913–3923 11 p.

  Research output: Contribution to journal › Article › Academic › peer-review

  Open Access

  • Atomic layer deposition
  • atomic layer epitaxy
  • Plasmas
  • Ligands
  • metal fluorides

• Surface passivation of germanium by atomic layer deposited Al2O3 nanolayers

  Berghuis, W-J. H., Melskens, J., Macco, B., Theeuwes, R. J., Verheijen, M. A. & Kessels, W. M. M., 28 Jan 2021, (E-pub ahead of print) In: Journal of Materials Research. XX, XX, 11 p.

  Research output: Contribution to journal › Article › Academic › peer-review

  Open Access

  • Germanium
  • Passivation
  • Aluminum oxide
  • passivity
  • germanium
• 2020

  16.8% Monolithic all-perovskite triple-junction solar cells via a universal two-step solution process

  Wang, J., Zardetto, V., Datta, K., Zhang, D., Wienk, M. M. & Janssen, R. A. J., 16 Oct 2020, In: Nature Communications. 11, 1, 10 p., 5254.

  Research output: Contribution to journal › Article › Academic › peer-review

  Open Access

  • perovskite
  • Intercellular Junctions
  • perovskites
  • solar cells
  • Conversion efficiency
  2 Citations (Scopus)

• ALD – a truly enabling nanotechnology: And how the Netherlands contributed to its wide spread application

  Kessels, W. M. M., 2 Jun 2020, In: Nevac Blad. 58, 2, p. 6-9 4 p., 2.

  Research output: Contribution to journal › Article › Popular

  Open Access

  • Nanotechnology
  • Deposition
  • The Netherlands
  • Layer
  • Integrated Circuits
  1 Downloads (Pure)

• Anisotropic infrared light emission from quasi-1D layered TiS₃

  Khatibi, A., Godiksen, R., Basuvalingam, S., Pellegrino, D., Bol, A., Shokri, B. & Curto, A. G., 1 Jan 2020, In: 2D Materials. 7, 1, 8 p., 015022.

  Research output: Contribution to journal › Article › Academic › peer-review

  Open Access

  File

  • Light emission
  • Excitons
  • light emission
  • Infrared radiation
  • Optoelectronic devices
  6 Citations (Scopus)

  38 Downloads (Pure)

• Area-selective atomic layer deposition for bottom-up fabrication of nanoelectronics

  Mackus, A. J. M., Merkx, M. J. M. & Li, J., 2 Jun 2020, In: Nevac Blad. 58, special on ALD, p. 32-34 2.

  Research output: Contribution to journal › Article › Popular

  • nanotechnology
  • electronics
  • innovation
  • Law
  11 Downloads (Pure)

• Area-Selective Atomic Layer Deposition of TiN Using Aromatic Inhibitor Molecules for Metal/Dielectric Selectivity

  Merkx, M. J. M., Vlaanderen, S., Faraz, T., Verheijen, M. A., Kessels, W. M. M. & MacKus, A. J. M., 22 Sep 2020, In: Chemistry of Materials. 32, 18, p. 7788-7795 8 p.

  Research output: Contribution to journal › Article › Academic › peer-review

  Open Access

  • Atomic layer deposition
  • Molecules
  • Metals
  • Plasmas
  • Nitrides
  4 Citations (Scopus)

• Area-Selective Atomic Layer Deposition of Two-Dimensional WS2 Nanolayers

  Balasubramanyam, S., Merkx, M. J. M., Verheijen, M. A., Kessels, W. M. M., Mackus, A. J. M. & Bol, A. A., 4 May 2020, In: ACS Materials Letters. 2, 5, p. 511-518 8 p.

  Research output: Contribution to journal › Article › Academic › peer-review

  Open Access
  10 Citations (Scopus)

• Atomic Layer Deposition for crystalline silicon solar cells: Innovate at the nanoscale, deploy at the gigawatt scale

  Macco, B., 2 Jun 2020, In: Nevac Blad. 58, special on ALD, p. 22-24 2.

  Research output: Contribution to journal › Article › Popular

  • atomic layer epitaxy
  • solar cells
  • solar energy
  • cells
  • platforms

• Atomic Layer Deposition of Al doped MoS2: Synthesizing a p-type 2D semiconductor with tunable carrier density

  Vandalon, V., Verheijen, M. A., Kessels, W. M. M. & Bol, A. A., 23 Oct 2020, In: ACS Applied Nano Materials. 3, 10, p. 10200-10208 9 p.

  Research output: Contribution to journal › Article › Academic › peer-review

  Open Access

  • Atomic layer deposition
  • Carrier concentration
  • Semiconductor materials
  • Nanoelectronics
  • Thickness control
  2 Citations (Scopus)

• Atomic layer deposition of aluminum phosphate using AlMe3, PO(OMe)3 and O2 plasma: film growth and surface reactions

  Hornsveld, N., Kessels, W. M. M. E. & Creatore, M. A., 5 Mar 2020, In: Journal of Physical Chemistry C. 124, 9, p. 5495-5505 11 p.

  Research output: Contribution to journal › Article › Academic › peer-review

  Open Access

  File

  • aluminum phosphate
  • Film growth
  • Atomic layer deposition
  • Surface reactions
  • Phosphorus
  1 Citation (Scopus)

  30 Downloads (Pure)

• Atomic layer deposition of cobalt phosphate from cobaltocene, trimethylphosphate, and O2 plasma

  Di Palma, V., Knoops, H. C. M., Kessels, W. M. M. E. & Creatore, M. A., 1 Mar 2020, In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces, and Films. 38, 2, 10 p., 022416.

  Research output: Contribution to journal › Article › Academic › peer-review

  Open Access

  File

  • trimethyl phosphate
  • Atomic layer deposition
  • Cobalt
  • Phosphates
  • atomic layer epitaxy
  1 Citation (Scopus)

  28 Downloads (Pure)

• Atomic layer deposition of Nb-doped TiO2: dopant incorporation and effect of annealing

  Berghuis, W-J. H., Melskens, J., Macco, B., Basuvalingam, S. B., Verheijen, M. A. & Kessels, W. M. M. E., 1 Mar 2020, In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces, and Films. 38, 2, 9 p., 022408.

  Research output: Contribution to journal › Article › Academic › peer-review

  Open Access

  File

  • Atomic layer deposition
  • Doping (additives)
  • atomic layer epitaxy
  • Annealing
  • titanium dioxide
  1 Citation (Scopus)

  3 Downloads (Pure)

• Atomic layer deposition of ruthenium using an ABC-type process: Role of oxygen exposure during nucleation

  Chopra, S. N., Vos, M. F. J., Verheijen, E., Ekerdt, J. G., Kessels, W. M. M. & Mackus, A. J. M., 1 Dec 2020, In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces, and Films. 38, 6, 9 p., 062402.

  Research output: Contribution to journal › Article › Academic › peer-review

  • Ruthenium
  • Atomic layer deposition
  • ruthenium
  • Nucleation
  • atomic layer epitaxy

• Ballistic Phonons in Ultrathin Nanowires

  Vakulov, D., Gireesan, S., Swinkels, M. Y., Chavez, R., Vogelaar, T., Torres, P., Campo, A., De Luca, M., Verheijen, M. A., Koelling, S., Gagliano, L., Haverkort, J. E. M., Alvarez, F. X., Bobbert, P. A., Zardo, I. & Bakkers, E. P. A. M., 8 Apr 2020, In: Nano Letters. 20, 4, p. 2703-2709 7 p.

  Research output: Contribution to journal › Article › Academic › peer-review

  Open Access

  File

  • Phonons
  • Nanowires
  • Ballistics
  • heat transmission
  • ballistics
  6 Citations (Scopus)

  27 Downloads (Pure)

• Bifacial four-terminal perovskite/silicon tandem solar cells and modules

  Coletti, G., Luxembourg, S. L., Geerlings, L. J., Rosca, V., Burgers, A. R., Wu, Y., Okel, L., Kloos, M., Danzl, F. J. K., Najafi, M., Zhang, D., Dogan, I., Zardetto, V., Di Giacomo, F., Kroon, J., Aernouts, T., Hüpkes, J., Burgess, C. H., Creatore, M. A., Andriessen, H. A. J. M. R. & 1 others, Veenstra, S. C., 29 Apr 2020, In: ACS Energy Letters. 5, 5, p. 1676-1680 5 p.

  Research output: Contribution to journal › Article › Academic › peer-review

• Characterization of a kHz atmospheric pressure plasma jet: Comparison of discharge propagation parameters in experiments and simulations without target

  Hofmans, M., Viegas, P., van Rooij, O., Klarenaar, B., Guaitella, O., Bourdon, A. & Sobota, A., Mar 2020, In: Plasma Sources Science and Technology. 29, 3, 15 p., 034003.

  Research output: Contribution to journal › Article › Academic › peer-review
  6 Citations (Scopus)

  2 Downloads (Pure)

• Charge carrier dynamics and photocatalytic activity of {111} and {100} faceted Ag₃PO₄particles

  Sinha, R., Friedrich, D., Zafeiropoulos, G., Zoethout, E., Parente, M., van de Sanden, M. C. M. & Bieberle-Hütter, A., 28 Jun 2020, In: Journal of Chemical Physics. 152, 24, 9 p., 244710.

  Research output: Contribution to journal › Article › Academic › peer-review

  • Photocatalytic activity
  • Charge carriers
  • charge carriers
  • Quantum yield
  • Photocatalysts

• CO₂Conversion in Nonuniform Discharges: Disentangling Dissociation and Recombination Mechanisms

  Wolf, A. J., Peeters, F. J. J., Groen, P. W. C., Bongers, W. A. & van de Sanden, M. C. M., 6 Aug 2020, In: Journal of Physical Chemistry C. 124, 31, p. 16806-16819 14 p.

  Research output: Contribution to journal › Article › Academic › peer-review

  • Plasmas
  • dissociation
  • Carbon Monoxide
  • Energy efficiency
  • synthetic fuels
  4 Citations (Scopus)

• Collective photothermal effect of Al2O3‐supported spheroidal plasmonic Ru nanoparticle catalysts in the sunlight‐powered Sabatier reaction

  Grote, R., Habets, R., Rohlfs, J., Sastre, F., Meulendijks, N., Xu, M., Verheijen, M. A., Elen, K., Hardy, A., van Bael, M. K., den Hartog, T. & Buskens, P., 19 Nov 2020, In: ChemCatChem. 12, 22, p. 5618-5622 5 p.

  Research output: Contribution to journal › Article › Academic › peer-review

  • Sabatier reaction
  • Plasmonic nanoparticles
  • Plasmons
  • Nanoparticles
  • catalysts

• Cu Electrodeposition on Nanostructured MoS2 and WS2 and Implications for HER Active Site Determination

  Wu, L., Dzade, N. Y., Chen, N., Van Dijk, B., Balasubramanyam, S., Sharma, A., Gao, L., Hetterscheid, D. G. H., Hensen, E. J. M., Bol, A. A., De Leeuw, N. H. & Hofmann, J. P., 1 Nov 2020, In: Journal of the Electrochemical Society. 167, 11, 8 p., 116517.

  Research output: Contribution to journal › Article › Academic › peer-review

  Open Access

  • Transition metals
  • Electrodeposition
  • X ray absorption spectroscopy
  • Atomic layer deposition
  • Gaging

• Direct-bandgap emission from hexagonal Ge and SiGe alloys

  Fadaly, E. M. T., Dijkstra, A., Suckert, J. R., Ziss, D., van Tilburg, M., Mao, C., Ren, Y., van Lange, V. T., Korzun, K., Kölling, S., Verheijen, M. A., Busse, D., Rödl, C., Furthmüller, J., Bechstedt, F., Stangl, J., Finley, J. J., Botti, S., Haverkort, J. E. M. & Bakkers, E. P. A. M., Apr 2020, In: Nature. 580, 7802, p. 205–209 5 p.

  Research output: Contribution to journal › Article › Academic › peer-review

  • Germanium
  • Silicon
  • Semiconductors
  • Light
  • Diamond
  40 Citations (Scopus)

  5 Downloads (Pure)

• Editorial Expression of Concern: Quantized Majorana conductance

  Zhang, H., Liu, C. X., Gazibegovic, S., Xu, D., Logan, J. A., Wang, G., Van Loo, N., Bommer, J. D. S., de Moor, M. W. A., Car, D., Op het Veld, R., van Veldhoven, P. J. R., Kölling, S., Verheijen, M. A., Pendharkar, M., Pennachio, D. J., Shojaei, B., Lee, J. S., Palmstrøm, C. J., Bakkers, E. P. A. M. & 2 others, Sarma, S. D. & Kouwenhoven, L. P., 1 May 2020, In: Nature. 581, 7807, p. E4

  Research output: Contribution to journal › Article › Academic › peer-review

  Open Access
  1 Citation (Scopus)

• Effect of an electric field during the deposition of silicon dioxide thin films by plasma enhanced atomic layer deposition: an experimental and computational study

  Beladiya, V., Becker, M., Faraz, T., Kessels, W. M. M., Schenk, P., Otto, F., Fritz, T., Gruenewald, M., Helbing, C., Jandt, K. D., Tünnermann, A., Sierka, M. & Szeghalmi, A., 21 Jan 2020, In: Nanoscale. 12, 3, p. 2089-2102 14 p.

  Research output: Contribution to journal › Article › Academic › peer-review

  • Atomic layer deposition
  • Silicon Dioxide
  • Silica
  • Thin films
  • Electric fields
  6 Citations (Scopus)

  1 Downloads (Pure)

• Effect of Different Bromine Sources on the Dual Cation Mixed Halide Perovskite Solar Cells

  Głowienka, D., Di Giacomo, F., Najafi, M., Dogan, I., Mameli, A., Colberts, F. J. M., Szmytkowski, J. & Galagan, Y., 28 Sep 2020, In: ACS Applied Energy Materials. 3, 9, p. 8285-8294 10 p.

  Research output: Contribution to journal › Article › Academic › peer-review

  Open Access

  • perovskite
  • Perovskite solar cells
  • cesium bromide
  • Bromine
  • Perovskite
  1 Citation (Scopus)

• Emission spectroscopy of He lines in high-density plasmas in Magnum-PSI

  Kajita, S., Akkermans, G., Fujii, K., van der Meiden, H. & van de Sanden, M. C. M., 1 Feb 2020, In: AIP Advances. 10, 2, 8 p., 025225.

  Research output: Contribution to journal › Article › Academic › peer-review

  Open Access

  • plasma density
  • helium
  • optical emission spectroscopy
  • spectroscopy
  • radiation trapping
  2 Citations (Scopus)

• Enhancing the Electrocatalytic Activity of Redox Stable Perovskite Fuel Electrodes in Solid Oxide Cells by Atomic Layer-Deposited Pt Nanoparticles

  Pandiyan, A., Di Palma, V., Kyriakou, V., Kessels, W. M. M., Creatore, M., Van De Sanden, M. C. M. & Tsampas, M. N., 24 Aug 2020, In: ACS Sustainable Chemistry and Engineering. 8, 33, p. 12646-12654 9 p.

  Research output: Contribution to journal › Article › Academic › peer-review

  • perovskite
  • Perovskite
  • Oxidation-Reduction
  • Oxides
  • Cermet Cements
  1 Citation (Scopus)

• Etching with atomic-level precision: The emerging field of atomic layer etching

  Mackus, A. J. M., Faraz, T. & Chittock, N., 2 Jun 2020, In: Nevac Blad. 58, special on ALD, p. 40-42 2.

  Research output: Contribution to journal › Article › Popular

  • Manufacturing Industry
  • Semiconductors
  8 Downloads (Pure)

• Evidence for low-energy ions influencing plasma-assisted atomic layer deposition of SiO2: Impact on the growth per cycle and wet etch rate

  Arts, K., Deijkers, J. H., Faraz, T., Puurunen, R. L., Kessels, W. M. M. & Knoops, H. C. M., 20 Jul 2020, In: Applied Physics Letters. 117, 3, 5 p., 031602.

  Research output: Contribution to journal › Article › Academic › peer-review

  • atomic layer epitaxy
  • cycles
  • ions
  • energy
  • quartz

• Evidence for Low-energy Ions Influencing Plasma-assisted Atomic Layer Deposition of SiO2: Impact on the Growth per Cycle and Wet Etch Rate

  Kessels, W. M. M., 1 Sep 2020, In: ILTPC Newsletter. 6, 1 p.

  Research output: Contribution to journal › Article › Academic › peer-review

  Open Access

  • atomic layer epitaxy
  • cycles
  • ions
  • energy

• Exploring voltage mediated delamination of suspended 2D materials as a cause of commonly observed breakdown

  Loessberg-Zahl, J., De Bruijn, D. S., van den Beld, W. T. E., Dollekamp, E., Grady, E., Keerthi, A., Bomer, J., Radha, B., Zandvliet, H. J. W., Bol, A. A., van den Berg, A. & Eijkel, J. C. T., 9 Jan 2020, In: Journal of Physical Chemistry C. 124, 1, p. 430-435 6 p.

  Research output: Contribution to journal › Article › Academic › peer-review

  • Graphite
  • Graphene
  • Delamination
  • graphene
  • breakdown

• Extraction of Dzyaloshinskii-Moriya interaction from propagating spin waves

  Lucassen, J., Schippers, C. F., Verheijen, M. A., Fritsch, P., Geluk, E. J., Barcones Campo, B., Duine, R. A., Wurmehl, S., Swagten, H. J. M., Koopmans, B. & Lavrijsen, R., 28 Feb 2020, In: Physical Review B. 101, 6, 6 p., 064432.

  Research output: Contribution to journal › Article › Academic › peer-review

  Open Access

  File
  2 Citations (Scopus)

  31 Downloads (Pure)

• Full characterization and modeling of graded interfaces in a high lattice-mismatch axial nanowire heterostructure

  Beznasyuk, D. V., Stepanov, P., Rouvière, J. L., Glas, F., Verheijen, M., Claudon, J. & Hocevar, M., Jul 2020, In: Physical Review Materials. 4, 7, 074607.

  Research output: Contribution to journal › Article › Academic › peer-review

  Open Access

  File

  • Lattice mismatch
  • Heterojunctions
  • Nanowires
  • nanowires
  • characterization
  8 Downloads (Pure)

• Hard superconducting gap and diffusion-induced superconductors in Ge-Si nanowires

  Ridderbos, J., Brauns, M., de Vries, F. K., Shen, J., Li, A., Kölling, S., Verheijen, M. A., Brinkman, A., van der Wiel, W. G., Bakkers, E. P. A. M. & Zwanenburg, F. A., 8 Jan 2020, In: Nano Letters. 20, 1, p. 122-130 9 p.

  Research output: Contribution to journal › Article › Academic › peer-review

  Open Access

  File

  • Superconducting materials
  • Nanowires
  • nanowires
  • Magnetic fields
  • critical temperature
  3 Citations (Scopus)

  48 Downloads (Pure)

• Implications of thermo-chemical instability on the contracted modes in CO₂ microwave plasmas

  Wolf, A. J., Righart, T. W. H., Peeters, F. J. J., Bongers, W. A. & van de Sanden, M. C. M., 4 Feb 2020, In: Plasma Sources Science and Technology. 29, 2, 11 p., 025005.

  Research output: Contribution to journal › Article › Academic › peer-review

  • microwaves
  • contraction
  • thermal dissociation
  • transition pressure
  • critical pressure
  12 Citations (Scopus)

• Improved Passivation of n-Type Poly-Si Based Passivating Contacts by the Application of Hydrogen-Rich Transparent Conductive Oxides

  Tutsch, L., Feldmann, F., Macco, B., Bivour, M., Kessels, W. M. M. E. & Hermle, M., Jul 2020, In: IEEE Journal of Photovoltaics. 10, 4, p. 986-991 6 p., 9093196.

  Research output: Contribution to journal › Article › Academic › peer-review

  Open Access

  • Passivation
  • Oxides
  • Polysilicon
  • Hydrogen
  • passivity
  5 Citations (Scopus)

• In-plane selective area InSb–Al nanowire quantum networks

  Op het Veld, R. L. M., Xu, D., Schaller, V., Verheijen, M. A., Peters, S. M. E., Jung, J., Tong, C., Wang, Q., de Moor, M. W. A., Hesselmann, B., Vermeulen, K., Bommer, J. D. S., Sue Lee, J., Sarikov, A., Pendharkar, M., Marzegalli, A., Koelling, S., Kouwenhoven, L. P., Miglio, L., Palmstrøm, C. J. & 2 others, Zhang, H. & Bakkers, E. P. A. M., 1 Dec 2020, In: Communications Physics. 3, 1, 7 p., 59.

  Research output: Contribution to journal › Article › Academic › peer-review

  Open Access

  • nanowires
  • nucleation
  • oscillations
  • phase coherence
  • quantum computers
  8 Citations (Scopus)