Fingerprint Dive into the research topics where Plasma & Materials Processing (PMP) is active. These topic labels come from the works of this organisation's members. Together they form a unique fingerprint.

  • Network Recent external collaboration on country level. Dive into details by clicking on the dots.

    Research Output

    Area-Selective Atomic Layer Deposition of Two-Dimensional WS2 Nanolayers

    Balasubramanyam, S., Merkx, M. J. M., Verheijen, M. A., Kessels, W. M. M., Mackus, A. J. M. & Bol, A. A., 8 Apr 2020, In : ACS Materials Letters. 2, 5, p. 511-518 8 p.

    Research output: Contribution to journalArticleAcademicpeer-review

    Open Access

    Atomic layer deposition of aluminum phosphate using AlMe3, PO(OMe)3 and O2 plasma: film growth and surface reactions

    Hornsveld, N., Kessels, W. M. M. E. & Creatore, M. A., 5 Mar 2020, In : Journal of Physical Chemistry C. 124, 9, p. 5495-5505 11 p.

    Research output: Contribution to journalArticleAcademicpeer-review

    Open Access
    File
  • 17 Downloads (Pure)
  • 1 Downloads (Pure)

    Equipment

    ALD

    J.J.M. Sanders (Manager)

    Plasma & Materials Processing

    Facility/equipment: Equipment

  • Prizes

    2nd prize student award competition

    Bart Macco (Recipient), 26 Jul 2016

    Prize: OtherCareer, activity or publication related prizes (lifetime, best paper, poster etc.)Scientific

    ALD Best Student Paper Award

    Martijn Vos (Recipient), 23 Jul 2019

    Prize: OtherCareer, activity or publication related prizes (lifetime, best paper, poster etc.)Scientific

    ALD Innovator Award

    Erwin Kessels (Recipient), 22 Jul 2019

    Prize: OtherCareer, activity or publication related prizes (lifetime, best paper, poster etc.)Scientific

    Activities

    New Process Concepts Towards Area-Selective Atomic Layer Deposition and Atomic Layer Etching of Zinc Oxide

    A. Mameli (Member), M.A. Verheijen (Member), B. Karasulu (Member), A.J.M. Mackus (Member), W.M.M. Kessels (Member), F. Roozeboom (Speaker)
    30 Sep 20184 Oct 2018

    Activity: Talk or presentation typesContributed talkScientific

    Atomic Layer Etching of ZnO on 2D and 3D substrates, using acetylacetone and O2 plasma

    A. Mameli (Member), M.A. Verheijen (Member), B. Karasulu (Member), A.J.M. Mackus (Member), W.M.M. Kessels (Member), F. Roozeboom (Invited speaker)
    24 Jul 201828 Jul 2018

    Activity: Talk or presentation typesInvited talkScientific

    Overview of approaches for achieving area-selective ALD

    A.J.M. Mackus (Invited speaker)
    29 Apr 20181 May 2018

    Activity: Talk or presentation typesInvited talkScientific

    Press / Media

    Manufacturing Bits: Feb. 18

    Karsten Arts

    18/02/20

    1 item of Media coverage

    Press/Media: Expert Comment

    Research areas

    Advanced ALD technologies

    M. (Adriana) Creatore (Researcher), W.M.M. (Erwin) Kessels (Researcher), Adrie J.M. Mackus (Researcher)

    Impact: Research Topic/Theme (at group level)

    ALD for energy

    M. (Adriana) Creatore (Researcher)

    Impact: Research Topic/Theme (at group level)

    CO2 neutral fuels

    Richard A.H. Engeln (Researcher), W.M.M. (Erwin) Kessels (Researcher)

    Impact: Research Topic/Theme (at group level)

    Student theses

    µ-Plasma assisted deposition of titanium dioxide thin films

    Author: Verheyen, J., 2017

    Supervisor: Creatore, M. (. (Supervisor 1), Aghaee, M. (Supervisor 2) & Stevens, A. A. (External coach)

    Student thesis: Master

    File

    ALD metal oxides for passivating contacts: in c-Si solar cells

    Author: Scheerder, R., 2017

    Supervisor: Melskens, J. (Supervisor 1), van de Loo, B. W. (Supervisor 2) & Kessels, W. (. (Supervisor 2)

    Student thesis: Master

    File