• P.O. Box 513, Flux

    5600 MB Eindhoven

    Netherlands

  • Groene Loper 19, Flux

    5612 AP Eindhoven

    Netherlands

Organization profile

Introduction / mission

Our scientific objective is to obtain atomic-level understanding of the interaction of plasmas and reactive gases with materials in the field of atomic scale processing.

Highlighted phrase

We are unique in our approach to studying plasma and surface processes in situ and in real time with a large set of current and new diagnostics

Organisational profile

We focus on advancing the science and technology of plasma and materials processing, a multidisciplinary research area that encompasses the research fields of plasma physics, surface science and materials science. Our aim is to be an internationally leading group in the field of atomic scale processing, for present-day and future applications in energy technologies, nanoelectronics and nanotechnology.

The group studies the physics of the plasma medium, how reactive species interact with surfaces and how atomic scale processes can be used to fabricate, prepare or modify materials and their surfaces. We do so through our advanced processing facilities, our large set of plasma and surface diagnostics and state-of-the-art material analysis techniques.

The interaction of plasmas and reactive gases with materials plays a key role in many fields in science and technology. Consequently, our research ranges from fundamental plasma studies for CO2 recycling to nanoscale deposition and etch processes for nanoelectronics and technologies for energy conversion and storage technologies. Our application-oriented research is directly relevant for many current developments within society and industry. This is illustrated by our many close industrial collaborations and a significant number of valorization successes in the recent years.

The PMP group has established an internationally leading position in the area of atomic scale processing, particularly in the preparation of nanolayers and nanostructures by means of methods such as  (plasma-based) atomic layer deposition (ALD). Building on this, we explore societally and technologically relevant new fields such as plasma-based approaches for CO2 recycling in renewable fuels, carrier-selective passivating contacts in silicon solar cells, area-selective ALD for semiconductor nanopatterning, nanolayer films to enable novel organo-lead halide perovskite solar cells and plasma-assisted ALD of 2D transition metal dichalcogenides (2D-TMDs). The common denominators between these research lines are the studies of the interaction of plasmas and reactive gases with materials by advanced diagnostics.

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  • Network Recent external collaboration on country level. Dive into details by clicking on the dots.

    Research Output

    ALD – a truly enabling nanotechnology: And how the Netherlands contributed to its wide spread application

    Kessels, W. M. M., 2 Jun 2020, In : Nevac Blad. 58, special, p. 6-9 2.

    Research output: Contribution to journalArticlePopular

  • Anisotropic infrared light emission from quasi-1D layered TiS3

    Khatibi, A., Godiksen, R., Basuvalingam, S., Pellegrino, D., Bol, A., Shokri, B. & Curto, A. G., 1 Jan 2020, In : 2D Materials. 7, 1, 8 p., 015022.

    Research output: Contribution to journalArticleAcademicpeer-review

    Open Access
    File
  • 1 Citation (Scopus)
    18 Downloads (Pure)

    Area-selective atomic layer deposition for bottom-up fabrication of nanoelectronics

    Mackus, A. J. M., Merkx, M. J. M. & Li, J., 2 Jun 2020, In : Nevac Blad. 58, special on ALD, p. 32-34 2.

    Research output: Contribution to journalArticlePopular

  • Equipment

    ALD

    J.J.M. Sanders (Manager)

    Plasma & Materials Processing

    Facility/equipment: Equipment

  • Chemical Vapor Deposition

    J.J.M. Sanders (Manager)

    Plasma & Materials Processing

    Facility/equipment: Equipment

  • Prizes

    2nd prize student award competition

    Bart Macco (Recipient), 26 Jul 2016

    Prize: OtherCareer, activity or publication related prizes (lifetime, best paper, poster etc.)Scientific

    ALD Best Student Paper Award

    Martijn Vos (Recipient), 23 Jul 2019

    Prize: OtherCareer, activity or publication related prizes (lifetime, best paper, poster etc.)Scientific

    ALD Best Student Paper Award

    Jeff J.P.M. Schulpen (Recipient), 29 Jun 2020

    Prize: OtherCareer, activity or publication related prizes (lifetime, best paper, poster etc.)Scientific

    Activities

    New Process Concepts Towards Area-Selective Atomic Layer Deposition and Atomic Layer Etching of Zinc Oxide

    A. Mameli (Member), M.A. Verheijen (Member), B. Karasulu (Member), A.J.M. Mackus (Member), W.M.M. Kessels (Member), F. Roozeboom (Speaker)
    30 Sep 20184 Oct 2018

    Activity: Talk or presentation typesContributed talkScientific

    Atomic Layer Etching of ZnO on 2D and 3D substrates, using acetylacetone and O2 plasma

    A. Mameli (Member), M.A. Verheijen (Member), B. Karasulu (Member), A.J.M. Mackus (Member), W.M.M. Kessels (Member), F. Roozeboom (Invited speaker)
    24 Jul 201828 Jul 2018

    Activity: Talk or presentation typesInvited talkScientific

    Overview of approaches for achieving area-selective ALD

    A.J.M. Mackus (Invited speaker)
    29 Apr 20181 May 2018

    Activity: Talk or presentation typesInvited talkScientific

    Press / Media

    Prof Talk | Two clicks away from cool

    W.M.M. (Erwin) Kessels

    2/07/20

    1 Media contribution

    Press/Media: Research

    TU/e needs to look for a new cleanroom

    W.M.M. (Erwin) Kessels

    26/06/20

    1 Media contribution

    Press/Media: Research

    Diplomatic research with India and Turkey

    Ageeth A. Bol

    2/06/20

    1 Media contribution

    Press/Media: Research

    Research areas

    Advanced ALD technologies

    M. (Adriana) Creatore (Researcher), W.M.M. (Erwin) Kessels (Researcher), Adrie J.M. Mackus (Researcher)

    Impact: Research Topic/Theme (at group level)

    ALD for energy

    M. (Adriana) Creatore (Researcher)

    Impact: Research Topic/Theme (at group level)

    CO2 neutral fuels

    Richard A.H. Engeln (Researcher), W.M.M. (Erwin) Kessels (Researcher)

    Impact: Research Topic/Theme (at group level)

    Student theses

    µ-Plasma assisted deposition of titanium dioxide thin films

    Author: Verheyen, J., 2017

    Supervisor: Creatore, M. (. (Supervisor 1), Aghaee, M. (Supervisor 2) & Stevens, A. A. (External coach)

    Student thesis: Master

    File

    ALD metal oxides for passivating contacts: in c-Si solar cells

    Author: Scheerder, R., 2017

    Supervisor: Melskens, J. (Supervisor 1), van de Loo, B. W. (Supervisor 2) & Kessels, W. (. (Supervisor 2)

    Student thesis: Master

    File