Projects per year
Organization profile
Introduction / mission
Our scientific objective is to obtain atomic-level understanding of the interaction of plasmas and reactive gases with materials in the field of atomic scale processing.
Highlighted phrase
We are unique in our approach to studying plasma and surface processes in situ and in real time with a large set of current and new diagnostics
Organisational profile
We focus on advancing the science and technology of plasma and materials processing, a multidisciplinary research area that encompasses the research fields of plasma physics, surface science and materials science. Our aim is to be an internationally leading group in the field of atomic scale processing, for present-day and future applications in energy technologies, nanoelectronics and nanotechnology.
The group studies the physics of the plasma medium, how reactive species interact with surfaces and how atomic scale processes can be used to fabricate, prepare or modify materials and their surfaces. We do so through our advanced processing facilities, our large set of plasma and surface diagnostics and state-of-the-art material analysis techniques.
The interaction of plasmas and reactive gases with materials plays a key role in many fields in science and technology. Consequently, our research ranges from fundamental plasma studies for CO2 recycling to nanoscale deposition and etch processes for nanoelectronics and technologies for energy conversion and storage technologies. Our application-oriented research is directly relevant for many current developments within society and industry. This is illustrated by our many close industrial collaborations and a significant number of valorization successes in the recent years.
The PMP group has established an internationally leading position in the area of atomic scale processing, particularly in the preparation of nanolayers and nanostructures by means of methods such as (plasma-based) atomic layer deposition (ALD). Building on this, we explore societally and technologically relevant new fields such as plasma-based approaches for CO2 recycling in renewable fuels, carrier-selective passivating contacts in silicon solar cells, area-selective ALD for semiconductor nanopatterning, nanolayer films to enable novel organo-lead halide perovskite solar cells and plasma-assisted ALD of 2D transition metal dichalcogenides (2D-TMDs). The common denominators between these research lines are the studies of the interaction of plasmas and reactive gases with materials by advanced diagnostics.
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Network
Profiles
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Karsten Arts, MSc
- Applied Physics, Atomic scale processing
- Applied Physics, Plasma & Materials Processing - University Researcher
Person: OWP : University Teacher / Researcher, OWP : University Teacher / Researcher
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Shashank Balasubramanyam
- Applied Physics, Plasma & Materials Processing - University Researcher
Person: OWP : University Teacher / Researcher
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Saravana Balaji Basuvalingam
- Applied Physics, Atomic scale processing
- Applied Physics, Plasma & Materials Processing - University Researcher
Person: OWP : University Teacher / Researcher, PD : Postdoc
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3DAM
Kessels, W. M. M., Vandalon, V., van Bommel, C., Shirazi, M., Faraz, T. & Schulpen, J. J. P. M.
1/04/16 → 1/04/19
Project: Research direct
Research output
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Absolute OH density measurements in a CO2-H2O glow discharge by laser-induced fluorescence spectroscopy
Budde, M., Martini, L. M., Ceppelli, M., Quercetti, S. & Engeln, R., May 2022, In: Plasma Sources Science and Technology. 31, 5, 12 p., 055002 .Research output: Contribution to journal › Article › Academic › peer-review
Open AccessFile -
Area-selective atomic layer deposition using small molecule inhibitors
Merkx, M. J. M., 22 Feb 2022, Eindhoven: Eindhoven University of Technology. 234 p.Research output: Thesis › Phd Thesis 1 (Research TU/e / Graduation TU/e)
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Atomic layer deposition for Li-ion batteries: Novel chemistries, surface reactions and film properties
Hornsveld, N., 26 Jan 2022, Eindhoven: Eindhoven University of Technology. 205 p.Research output: Thesis › Phd Thesis 1 (Research TU/e / Graduation TU/e)
Open AccessFile
Equipment
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Ceramic Cascade Arch
M.C.M. (Richard) van de Sanden (Manager)
Plasma & Materials ProcessingFacility/equipment: Equipment
Prizes
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2nd prize student award competition
Macco, Bart (Recipient), 26 Jul 2016
Prize: Other › Career, activity or publication related prizes (lifetime, best paper, poster etc.) › Scientific
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ALD Best Student Paper Award
Vos, M. (Recipient), 23 Jul 2019
Prize: Other › Career, activity or publication related prizes (lifetime, best paper, poster etc.) › Scientific
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ALD Best Student Paper Award
Schulpen, Jeff J.P.M. (Recipient), 29 Jun 2020
Prize: Other › Career, activity or publication related prizes (lifetime, best paper, poster etc.) › Scientific
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12th International Conference on Crystalline Silicon Photvoltaics 2022
Roel J. Theeuwes (Participant)
28 Mar 2022 → 30 Mar 2022Activity: Participating in or organising an event types › Conference › Scientific
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Excellent Surface Passivation of Textured n+-doped Silicon by POx/Al203 Stacks
Roel J. Theeuwes (Speaker)
28 Mar 2022Activity: Talk or presentation types › Contributed talk › Scientific
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Plasma-assisted atomic layer deposition: from basics to applications
W.M.M. (Erwin) Kessels (Speaker)
10 Feb 2021Activity: Talk or presentation types › Keynote talk › Scientific
Press / Media
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The solar tech check: Key takeaways from SiliconPV 2022
1/04/22
1 item of Media coverage
Press/Media: Expert Comment
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2D TMD Materials Enabling Future Electronics
Shashank Balasubramanyam, Marc J.M. Merkx, Marcel A. Verheijen, W.M.M. (Erwin) Kessels, Adrie J.M. Mackus & Ageeth A. Bol
27/06/21
1 Media contribution
Press/Media: Expert Comment
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-Eindhoven University of Technology: Dutch Academy rewards Eindhoven scientists for their efforts in science communication
Bart Macco, Auke E. Hoekstra, Heleen C. de Coninck & Anna J. Wieczorek
26/04/21
1 item of Media coverage
Press/Media: Expert Comment
Impacts
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Advanced ALD technologies
M. (Adriana) Creatore (Researcher), W.M.M. (Erwin) Kessels (Researcher) & Adrie J.M. Mackus (Researcher)
Impact: Research Topic/Theme (at group level)
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CO2 neutral fuels
Richard A.H. Engeln (Researcher) & W.M.M. (Erwin) Kessels (Researcher)
Impact: Research Topic/Theme (at group level)
Student theses
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µ-Plasma assisted deposition of titanium dioxide thin films
Author: Verheyen, J., 2017Supervisor: Creatore, M. (Supervisor 1), Aghaee, M. (Supervisor 2) & Stevens, A. A. E. (External coach)
Student thesis: Master
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Ab-initio insights into the tunability of the electronic structure in transition metal dichalcogenide alloys grown by atomic layer deposition
Author: Schulpen, J. J. P. M., 2018Supervisor: Vandalon, V. (Supervisor 1) & Bol, A. A. (Supervisor 2)
Student thesis: Master
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Adding H2O to CO2 in a dielectric-barrier discharge
Author: Rompelberg, R. M. H., 2017Supervisor: Engeln, R. A. H. (Supervisor 1), Klarenaar, B. L. M. (Supervisor 2) & Damen, M. A. (Supervisor 2)
Student thesis: Bachelor
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