Equipment
BVR2008 FC Electron Beam Evaporator
Erik Jan Geluk (Manager)
NanoLab@TU/eFacility/equipment: Equipment
Diamond tool scribers, Karl Suss and Loomis
Tjibbe de Vries (Manager)
NanoLab@TU/eFacility/equipment: Equipment
Raith EBPG 5150 Electron Beam Lithography
Erik Jan Geluk (Manager)
NanoLab@TU/eFacility/equipment: Equipment
Rapid Thermal Annealer 1, Jipelec
Tjibbe de Vries (Manager)
NanoLab@TU/eFacility/equipment: Equipment
Rapid Thermal Annealer 2, Jipelec
Tjibbe de Vries (Manager)
NanoLab@TU/eFacility/equipment: Equipment
Semi Automatic Mask Aligner EVG 620NT
Tjibbe de Vries (Manager)
NanoLab@TU/eFacility/equipment: Equipment
Semi Automatic Wafer Bonder EVG 520IS
Tjibbe de Vries (Manager)
NanoLab@TU/eFacility/equipment: Equipment
Sentech InP ICP Reactive Ion Etcher
Tjibbe de Vries (Manager)
NanoLab@TU/eFacility/equipment: Equipment
Spectroscopic ellipsometer, Sentech
Tjibbe de Vries (Manager)
NanoLab@TU/eFacility/equipment: Equipment
Temescal FC2000 Electron Beam Evaporator
Erik Jan Geluk (Manager)
NanoLab@TU/eFacility/equipment: Equipment