Photonic Integration

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• Au/Ag Thermal Evaporator, Edwards

  Erik Jan Geluk (Manager)

  NanoLab@TU/e

  Facility/equipment: Equipment

• BVR2008 FC Electron Beam Evaporator

  Erik Jan Geluk (Manager)

  NanoLab@TU/e

  Facility/equipment: Equipment

• Diamond tool scribers, Karl Suss and Loomis

  Tjibbe de Vries (Manager)

  NanoLab@TU/e

  Facility/equipment: Equipment

• Ionwave, Tepla

  Tjibbe de Vries (Manager)

  NanoLab@TU/e

  Facility/equipment: Equipment

• Karl Suss MA-6 contact aligner

  Tjibbe de Vries (Manager)

  NanoLab@TU/e

  Facility/equipment: Equipment

• Mechanical / chemical polishing

  Tjibbe de Vries (Manager)

  NanoLab@TU/e

  Facility/equipment: Equipment

• Optical Microscopes

  Tjibbe de Vries (Manager)

  NanoLab@TU/e

  Facility/equipment: Equipment

• Oxford General Purpose RIE

  Tjibbe de Vries (Manager)

  NanoLab@TU/e

  Facility/equipment: Equipment

• Oxford ICP

  Erik Jan Geluk (Manager)

  NanoLab@TU/e

  Facility/equipment: Equipment

• Oxford Oxide/Nitride ICP PECVD

  Tjibbe de Vries (Manager)

  NanoLab@TU/e

  Facility/equipment: Equipment

• Oxford Oxide/Nitride PECVD

  Tjibbe de Vries (Manager)

  NanoLab@TU/e

  Facility/equipment: Equipment

• PHI OLA 1&2

  E.A.J.M. Bente (Manager)

  Photonic Integration

  Facility/equipment: Research lab

• Polymer layer spinning

  Tjibbe de Vries (Manager)

  NanoLab@TU/e

  Facility/equipment: Equipment

• Raith EBPG 5150 Electron Beam Lithography

  Erik Jan Geluk (Manager)

  NanoLab@TU/e

  Facility/equipment: Equipment

• Rapid Thermal Annealer 1, Jipelec

  Tjibbe de Vries (Manager)

  NanoLab@TU/e

  Facility/equipment: Equipment

• Rapid Thermal Annealer 2, Jipelec

  Tjibbe de Vries (Manager)

  NanoLab@TU/e

  Facility/equipment: Equipment

• Resist deposition, GYRSET

  Tjibbe de Vries (Manager)

  NanoLab@TU/e

  Facility/equipment: Equipment

• Semi Automatic Mask Aligner EVG 620NT

  Tjibbe de Vries (Manager)

  NanoLab@TU/e

  Facility/equipment: Equipment

• Semi Automatic Wafer Bonder EVG 520IS

  Tjibbe de Vries (Manager)

  NanoLab@TU/e

  Facility/equipment: Equipment

• SEM JEOL

  Erik Jan Geluk (Manager)

  NanoLab@TU/e

  Facility/equipment: Equipment

• Sentech InP ICP Reactive Ion Etcher

  Tjibbe de Vries (Manager)

  NanoLab@TU/e

  Facility/equipment: Equipment

• Spectroscopic ellipsometer, Sentech

  Tjibbe de Vries (Manager)

  NanoLab@TU/e

  Facility/equipment: Equipment

• Temescal FC2000 Electron Beam Evaporator

  Erik Jan Geluk (Manager)

  NanoLab@TU/e

  Facility/equipment: Equipment