Organization profile

Introduction / mission

The NanoLab@TU/e is a world-class facility for fundamental research. It plays an important role in the research carried out at Eindhoven University of Technology (TU/e) and supports nanotechnology research and innovation throughout the Netherlands.

Highlighted phrase

With its extensive laboratory facilities, the NanoLab@TU/e offers a wide spectrum of opportunities for research and development activities

Organisational profile

The NanoLab@TU/e hosts both elite academic research and a multitude of industrial collaborations. It is an open-access research laboratory, available to TU/e, other research centers and industrial partners. This approach helps fundamental research insights quickly find their way into industry. Some examples of the fundamental research topics in the NanoLab@TU/e: nanowires, single-photon emitters, photonic integrated circuits and the fabrication of ultrathin layers with top-of-the-line atomic layer deposition equipment.

Unique cleanroom expertise

The NanoLab@TU/e facilities include an 800 m2 fully equipped cleanroom (ISO class 6) with state-of-the-art equipment. Within that cleanroom, there is a separate lithography section. Unique in the Netherlands and even the world, the NanoLab@TU/e has an ASML scanner to produce features as small as 100 nm on 3-inch indium phosphide wafers. In addition, the NanoLab@TU/e also has expert functions in processing of III/V semiconductors and especially in epitaxial growth of the materials.

Additional facilities and support

Additional labs hold scanning electron microscopes and nano-prototyping and bonding equipment. A wide range of atomic layer deposition equipment is also available.

A staff of professional engineers and experts offers skillful technical support. NanoLab@TU/e is located at the TU/e Campus in the center of Eindhoven and is easily accessible either by car or public transport.

Fingerprint Dive into the research topics where NanoLab@TU/e is active. These topic labels come from the works of this organisation's members. Together they form a unique fingerprint.

Photonics Engineering & Materials Science
photonics Physics & Astronomy
integrated circuits Physics & Astronomy
Integrated circuits Engineering & Materials Science
waveguides Physics & Astronomy
ring lasers Physics & Astronomy
tunable lasers Physics & Astronomy
wavelengths Physics & Astronomy

Network Recent external collaboration on country level. Dive into details by clicking on the dots.


Photo of Huub P.M.M. Ambrosius

Huub P.M.M. Ambrosius

Person: OBP : Supportive and management staff

Photo of Jeroen Bolk

Jeroen Bolk

Person: OBP : Supportive and management staff

No photo of Niall Kelly

Niall Kelly

Person: OWP : University Teacher / Researcher


Research Output 2004 2020

Indium phosphide membrane nanophotonic integrated circuits on silicon

Jiao, Y., van der Tol, J., Pogoretskii, V., van Engelen, J., Kashi, A. A., Reniers, S., Wang, Y., Zhao, X., Yao, W., Liu, T., Pagliano, F., Fiore, A., Zhang, X., Cao, Z., Kumar, R. R., Tsang, H. K., van Veldhoven, R., de Vries, T., Geluk, E. J., Bolk, J. & 3 others, Ambrosius, H., Smit, M. & Williams, K., Jan 2020, (Accepted/In press) In : Physica Status Solidi (A) Applications and Materials Science. 1900606.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
Indium phosphide
indium phosphides

Application of optical proximity correction for 193 nm deep UV enabled InP photonic integrated circuits

Bolk, J., Ambrosius, H., Latkowski, S., Unal, N., Ritter, D. & Williams, K., 25 Apr 2019, p. 1-3. 3 p.

Research output: Contribution to conferencePosterAcademic

integrated circuits
3 Citations (Scopus)
34 Downloads (Pure)

Area-selective atomic layer deposition of ZnO by area activation using electron beam-induced deposition

Mameli, A., Karasulu, B., Verheijen, M., Barcones Campo, B., Macco, B., Mackus, A., Kessels, E. & Roozeboom, F., 26 Feb 2019, In : Chemistry of Materials. 31, 4, p. 1250-1257 8 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
Atomic layer deposition
Electron beams
Chemical activation
Density functional theory

Press / Media

Trymax Reports Order from Photonics Research Organization

Huub P.M.M. Ambrosius


1 item of Media coverage

Press/Media: Expert Comment

Trymax Secures Order from Photonics Research Organization

Huub P.M.M. Ambrosius


1 item of Media coverage

Press/Media: Expert Comment

Trymax Gets Order from Photonics Research Organization

Huub P.M.M. Ambrosius


1 item of Media coverage

Press/Media: Expert Comment