Organization profile

Introduction / mission

The NanoLab@TU/e is a world-class facility for fundamental research. It plays an important role in the research carried out at Eindhoven University of Technology (TU/e) and supports nanotechnology research and innovation throughout the Netherlands.

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With its extensive laboratory facilities, the NanoLab@TU/e offers a wide spectrum of opportunities for research and development activities

Organisational profile

The NanoLab@TU/e hosts both elite academic research and a multitude of industrial collaborations. It is an open-access research laboratory, available to TU/e, other research centers and industrial partners. This approach helps fundamental research insights quickly find their way into industry. Some examples of the fundamental research topics in the NanoLab@TU/e: nanowires, single-photon emitters, photonic integrated circuits and the fabrication of ultrathin layers with top-of-the-line atomic layer deposition equipment.

Unique cleanroom expertise

The NanoLab@TU/e facilities include an 800 m2 fully equipped cleanroom (ISO class 6) with state-of-the-art equipment. Within that cleanroom, there is a separate lithography section. Unique in the Netherlands and even the world, the NanoLab@TU/e has an ASML scanner to produce features as small as 100 nm on 3-inch indium phosphide wafers. In addition, the NanoLab@TU/e also has expert functions in processing of III/V semiconductors and especially in epitaxial growth of the materials.

Additional facilities and support

Additional labs hold scanning electron microscopes and nano-prototyping and bonding equipment. A wide range of atomic layer deposition equipment is also available.

A staff of professional engineers and experts offers skillful technical support. NanoLab@TU/e is located at the TU/e Campus in the center of Eindhoven and is easily accessible either by car or public transport.

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Network

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