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  • 2013

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    Ouweltjes, O., Nieuwendijk, J. A. M., Kooijman, G. & Aarts, R. M., 19 Nov 2013, Patent No. US 8588449B2, Priority date 6 Apr 2010, Priority No. WO2010IB51481

    Research output: PatentPatent publication

    Open Access
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    27 Downloads (Pure)
  • 2008

    Lithographic apparatus, device manufacturing methods, mask and method of characterizing a mask and/or pellicle

    Jasper, J. C. M., Baggen, M. K. M., Bruls, R. J., Cicilia, O. S., van Dijck, H. A. L., Hofmans, G. C. J., Jansen, A. J. M., Luijten, C. C. M., Pongers, W. R., Wehrens, M. G. D., Uitterdijk, T., Boom, H. & Demarteau, M. J. L. M., 12 Jun 2008, Patent No. US2008137049

    Research output: PatentPatent publication

    Open Access
    File
    31 Downloads (Pure)
  • 2006

    Lithographic apparatus and device manufacturing method

    Luijten, C. C. M., Donders, S. N. L., Kemper, N. R., Leenders, M. H. A., Loopstra, E. R., Streefkerk, B., Beckers, M., Boom, H. & Moerman, R., 30 Mar 2006, Patent No. US2006066826

    Research output: PatentPatent publication

    Open Access
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    59 Downloads (Pure)