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Electromechanics Lab
Electrical Engineering
Electromechanics and Power Electronics
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Researchers
(33)
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(43)
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Research output
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2016
High-voltage actuation system for future generation lithography systems : actuator
van Beek, T. A.,
Jansen, J. W.
, Gysen, B. L. J. &
Lomonova, E. A.
,
21 Jun 2016
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