Department of Electrical Engineering

Equipment

Pulsed Heater Micro Reactor

Ton Backx (Manager)

Control Systems

Facility/equipment: Equipment

Radio over Fiber

E. Tangdiongga (Manager)

Electro-Optical Communications

Facility/equipment: Research lab

Raith EBPG 5150 Electron Beam Lithography

Erik Jan Geluk (Manager)

NanoLab@TU/e

Facility/equipment: Equipment

Rapid Thermal Annealer 1, Jipelec

Tjibbe de Vries (Manager)

NanoLab@TU/e

Facility/equipment: Equipment

Rapid Thermal Annealer 2, Jipelec

Tjibbe de Vries (Manager)

NanoLab@TU/e

Facility/equipment: Equipment

Resist deposition, GYRSET

Tjibbe de Vries (Manager)

NanoLab@TU/e

Facility/equipment: Equipment

Semi Automatic Mask Aligner EVG 620NT

Tjibbe de Vries (Manager)

NanoLab@TU/e

Facility/equipment: Equipment

Semi Automatic Wafer Bonder EVG 520IS

Tjibbe de Vries (Manager)

NanoLab@TU/e

Facility/equipment: Equipment

SEM JEOL

Erik Jan Geluk (Manager)

NanoLab@TU/e

Facility/equipment: Equipment

Sentech InP ICP Reactive Ion Etcher

Tjibbe de Vries (Manager)

NanoLab@TU/e

Facility/equipment: Equipment