Department of Applied Physics

Research Output 1952 2020

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Patent publication
2018

Perovskite contacting passivating barrier layer for solar cells

Kuang, Y., Schropp, R. E. I., Koushik, D., Creatore, M. & Veenstra, S., 11 Jan 2018, IPC No. H01L 51/42 (2006.01), Patent No. WO2018007586A1, 7 Jul 2017, Priority date 7 Jul 2016, Priority No. 62359656

Research output: PatentPatent publicationProfessional

Open Access
File
barrier layers
solar cells
electrons
oxides
electrodes
2017

A biosensor device and a method of manufacturing the same

Garcia Tello, P. & Roozeboom, F., 28 Nov 2017, IPC No. C40B 50/ 00 A I, Patent No. US9829485, Priority date 12 Nov 2008, Priority No. WO2008IB54732

Research output: PatentPatent publicationProfessional

Open Access
File
bioinstrumentation
manufacturing
porosity
sensors
electromagnetic radiation

Apparatus and method for reactive ion etching

Roozeboom, F., Lankhorst, A. M., Poodt, P. W. G., Koster, N. B., Winands, G. J. J. & Vermeer, A. J. P. M., 12 Sep 2017, Patent No. US9761458, Priority date 12 Sep 2017, Priority No. EP20100154955 20100226

Research output: PatentPatent publicationProfessional

Open Access
File
passivity
etching
ions
gases
cavities

Method and apparatus for depositing atomic layers on a substrate

Knaapen, R. J. W., Olieslagers, R., van den Berg, D., van den Boer, M. C., Maas, D. J., Donck, van der, J. C. J. J. & Roozeboom, F., 14 Feb 2017, IPC No. C23C 16/ 52 A I, Patent No. US9567671, Priority date 30 Jul 2012, Priority No. WO2012NL50540

Research output: PatentPatent publicationProfessional

Open Access
File
gas supply
substrate
gas
trajectory
method

Method and apparatus for depositing atomic layers on a substrate

Vermeer, A. J. P. M., Roozeboom, F. & van Deelen, J., 31 Oct 2017, IPC No. C23C 16/ 52 A I, Patent No. US9803280, Priority date 21 Mar 2016, Priority No. US201615075341

Research output: PatentPatent publicationProfessional

Open Access
File
gases
drums
supplying

Plasma atomic layer deposition

Knoops, H. C. M., de Peuter, K. & Kessels, W. M. M., 2 May 2017, Patent No. US9637823, Priority No. US201414231317 20140331

Research output: PatentPatent publicationProfessional

Open Access
File
atomic layer epitaxy
impurities
silicon nitrides
refraction
modulation
2015

Plasma atomic layer deposition

Knoops, H. C. M., de Peuter, K. & Kessels, W. M. M., 1 Oct 2015, Patent No. US20150279681 (A1), Priority No. US201414231317 20140331

Research output: PatentPatent publicationProfessional

Open Access
File
atomic layer epitaxy
impurities
silicon nitrides
refraction
modulation
2014

Direct band bap wurtzite semiconductor nanowires

Assali, S., Zardo, I., Haverkort, J. E. M. & Bakkers, E. P. A. M., 21 Aug 2014, Patent No. US2014230720

Research output: PatentPatent publicationProfessional

Open Access
File
wurtzite
nanowires
crystal structure
zincblende
optoelectronic devices

Method for manufacturing a solar cell with a surface-passivating dielectric double layer, and corresponding solar cell

Schmidt, J. & Hoex, B., 27 Aug 2014, Patent No. EP2220689, Priority date 14 Nov 2007, Priority No. DE20071054384

Research output: PatentPatent publicationProfessional

Open Access
File
manufacturing
aluminum oxides
solar cells
passivity
vapor deposition

Organic solar cell with a translucent top electrode and method for depositing such an electrode

Hannour, F., Palaniswamy, G., Janssen, R. A. J., Gupta, D. & Wienk, M. M., 19 Jun 2014, Patent No. WO2014090394

Research output: PatentPatent publicationProfessional

Open Access
File
solar cells
electrodes
conductivity
accumulators
polymers
2013

Supported polysilsesquioxane membrane and production thereof

Kreiter, R., Creatore, M., Cuperus, F. P., Vente, J. F. & Tchoua Ngamou, P. H., 10 May 2013, Patent No. WO2013066184 A1, Priority date 28 Apr 1956, Priority No. NL2011200770520111102

Research output: PatentPatent publicationProfessional

Open Access
File
Silanes
Silicon
Membranes
Silicon Dioxide
Atoms

Through-substrate via and redistribution layer with metal paste

Roozeboom, F., Grunsven, van, E. C. E., Sanders, F. H. M. & Burghoorn, M. M. A., 12 Mar 2013, Patent No. US8395267

Research output: PatentPatent publicationProfessional

Open Access
File
semiconductor devices
metals
masking
conductors
passivity
2012

Apparatus and process for producing thin films and devices

Schropp, R. E. I., van der Werf, C. H. M. & Stannowski, B., 15 Jan 2012, IPC No. H01L21/318 A I, Patent No. AT541065T, Priority date 12 Mar 2004, Priority No. EP20040075801

Research output: PatentPatent publicationProfessional

thin films
filaments
inventions
shutters
silicon nitrides

Beam pulsing device for use in charged-particle microscopy

Kieft, E. R., Kiewiet, F. B., Lassise, A., Luiten, O. J., Mutsaers, P. H. A., Vredenbregt, E. J. D. & Henstra, A., 22 Oct 2012, Patent No. EP2722865

Research output: PatentPatent publicationProfessional

Open Access
File
charged particles
microscopy
cavity resonators
holders
deflection

Hot wire chemical vapour deposition process for producing an inorganic-polymer multi-layer stack

Schropp, R. E. I., Spee, D. A., Rath, J. K. & van der Werf, C. H. M., 6 Dec 2012, IPC No. H01L 51/ 00 A I, Patent No. WO2012165944, Priority date 27 May 2011, Priority No. US201161490604P

Research output: PatentPatent publicationProfessional

Open Access
File
Inorganic polymers
Chemical vapor deposition
Wire
Patents and inventions
Polymers

Plasma pre-treatment

Potts, S. E. & Kessels, W. M. M., 13 Dec 2012, Patent No. WO2012168248, Priority date 6 Jun 2011, Priority No. US201161520175P

Research output: PatentPatent publicationProfessional

Open Access
File
atomic layer epitaxy
pretreatment
metals
thin films
metal nitrides

Process for the preparation of a conductive polymer composition

Koning, C. E., Tkalya, E. & Schoot, van der, P. P. A. M., 1 Nov 2012, Patent No. WO2012146703, Priority date 27 Apr 2011, Priority No. EP20110003445

Research output: PatentPatent publicationProfessional

Open Access
File
Polymers
Chemical analysis
Water
Latex
Patents and inventions

Wire-type waveguide for TeraHertz radiation

Tripodi, L., Gomez Rivas, J., Leuven, van, P. G., Beurden, van, M. C., Berrier, A. & Matters - Kammerer, M., 19 Apr 2012, Patent No. WO2012049587

Research output: PatentPatent publicationProfessional

Open Access
File
electromagnetic radiation
wire
waveguides
radiation
bandwidth
2011

Device, system and method for the measurement of a vapor transmission rate through a film of permeable material

Goosen, J., Qian, L., Sanden, van de, M. C. M., van Beek, J. T. M. & Kamminga, J. D., 20 Sep 2011, Patent No. NL2004419, Priority date 17 Mar 2010, Priority No. NL20102004419

Research output: PatentPatent publicationProfessional

Open Access
File
vapors

Device and method for generating a plasma discharge for patterning the surface of a substrate

Blom, P. M., Stevens, A. A. E., Huijbregts, L., De Haan, H. A. M., Van Schijndel, A. H., Te Sligte, E., Van Hijningen, C. J. & Huiskamp, T., 25 Aug 2011, Patent No. WO2011102711 (A1), Priority date 17 Feb 2010, Priority No. WO2010NL50079

Research output: PatentPatent publicationProfessional

plasma jets
electrodes
positioning
high voltages
2010

Interfaces and method for wireless-optical and optical-wireless conversion

Patarata Romeira, B. M., Figueiredo, J. M. L., Ironside, C. N. & Slight, T. J., 14 May 2010, Patent No. WO2010052481-A1

Research output: PatentPatent publicationProfessional

oscillators
optical communication
output
resonant tunneling diodes
synchronism

Method for forming microscopic structures on a substrate

Jong, de, A. F., Mulders, J. J. L., Kessels, W. M. M. & Mackus, A. J. M., 24 Jun 2010, Patent No. US2010159370

Research output: PatentPatent publicationProfessional

Open Access
File
seeds
inventions
particle beams
atomic layer epitaxy
vapor deposition

Method for passivating at least a part of a substrate surface

Illiberi, A., Hoex, B., Kessels, W. M. M. & Sanden, van de, M. C. M., 9 Dec 2010, Patent No. WO2010140889

Research output: PatentPatent publicationProfessional

Open Access
File
chambers
nozzles
passivity
supersonic speed
injection

Microphone

Langereis, G., Lippen, van, T., Roozeboom, F., Suy, H., Reimann, K., van Beek, J. T. M., Avoort, van der, C., Wingerden, van, J., Phan, le, K., Goossens, M. & Steeneken, P. G., 28 Oct 2010, Patent No. WO2010122487

Research output: PatentPatent publicationProfessional

Open Access
File
Membranes
Acoustics
Noise
Suspensions

Semiconductor apparatus and method of fabrication for a semiconductor apparatus

Engelhart, P., Seguin, R., Kessels, W. M. M. & Dingemans, G., 23 Dec 2010, Patent No. WO2010145648

Research output: PatentPatent publicationProfessional

Open Access
File
fabrication
passivity
surface layers
inventions
solar cells

Semiconductor sensor device, diagnostic instrument comprising such a device and method of manufacturing such a device

Kahya, M. N. & Bakkers, E. P. A. M., 28 Jan 2010, Patent No. US2010019226

Research output: PatentPatent publicationProfessional

Open Access
File
manufacturing
sensors
mesas
inventions
conduction

Solar cell

Dingemans, G., Engelhart, P., Kessels, W. M. M. & Wanka, S., 24 Jun 2010, Patent No. WO2010070013

Research output: PatentPatent publicationProfessional

Open Access
File
solar cell
tunnel
semiconductor
material

Solar Cell

Engelhart, P., Wanka, S., Dingemans, G. & Kessels, W. M. M., 24 Jun 2010, Patent No. WO2010070015

Research output: PatentPatent publicationProfessional

Open Access
File
inversion layer
solar cell
semiconductor
material

Substrate structure grown by plasma deposition

Vries, de, H. W. & Sanden, van de, M. C. M., 16 Dec 2010, Patent No. WO2010142972

Research output: PatentPatent publicationProfessional

Open Access
File
exponents
scaling
plasma layers
roughness

Through-substrate via and redistribution layer with metal paste

Roozeboom, F., Grunsven, van, E. C. E., Sanders, F. H. M. & Burghoorn, M. M. A., 6 May 2010, Patent No. WO2010049852

Research output: PatentPatent publicationProfessional

Open Access
File
semiconductor devices
inventions
metals
masking
conductors

Two layer barrier on polymeric substrate

Vries, de, H. W. & Sanden, van de, M. C. M., 19 Aug 2010, Patent No. WO2010092383

Research output: PatentPatent publicationProfessional

Open Access
File
barrier layers
inorganic materials
gas composition
power supplies
plasma control
2009

A biosensor device and a method of manufacturing the same

Garcia Tello, P. & Roozeboom, F., 22 May 2009, Patent No. WO2009063408

Research output: PatentPatent publicationProfessional

bioinstrumentation
manufacturing
porosity
sensors
electromagnetic radiation

Debris prevention system, radiation system, and lithograpic apparatus

Herpen, van, M. W., Soer, W. A. & Gielissen, K., 22 Jan 2009, Patent No. US2009021705

Research output: PatentPatent publicationProfessional

transmittance
radiation

Electronic device and method of manufacturing an electronic device

Roozeboom, F., Lifka, H., Vanhelmont, F. & Dekkers, W., 26 Nov 2009, Patent No. US20090289265

Research output: PatentPatent publicationProfessional

Organic light emitting diodes (OLED)
Semiconductor materials

Enhanced surface area structure

Kochupurackal, J. B. P., Roozeboom, F., Klootwijk, J. H. & Dekkers, W., 17 Dec 2009, Patent No. WO2009150600

Research output: PatentPatent publicationProfessional

Capacitors
Electrodes

Lithographic apparatus and device manufacturing method

Herpen, van, M. W., Banine, V. Y., Kuster, de, J. P. H., Moors, R., Stevens, L. H. J., Wolschrijn, B. T., Sidelnikov, Y., Velden, van der, M. H., Soer, W. A., Stein, T. & Gielissen, K., 9 Jul 2009, Patent No. US2009173360

Research output: PatentPatent publicationProfessional

manufacturing
radiation
detectors
electron emission
dosage

Method for manufacturing a multi-layer stack structure with improved WVTR barrier property

Vries, de, H. & Sanden, van de, M. C. M., 13 Aug 2009, Patent No. WO2009099325

Research output: PatentPatent publicationProfessional

Open Access
File
manufacturing
barrier layers
adhesives
glow discharges
atmospheric pressure

Method for manufacturing an electric device with a layer of conductive material contracted by nanowire

van Schaijk, R. T. F., Agarwal, P., Bakkers, E. P. A. M., Lankhorst, M. H. R., Duuren, M. J., Balkenende, A. R., Feiner, L. F. & Woerlee, P. H., 13 Aug 2009, Patent No. US20090200536

Research output: PatentPatent publicationProfessional

Open Access
File
Conductive materials
Nanowires
Data storage equipment
Patents and inventions
Phase change materials

Method of forming a nanocluster comprising dielectric layer and device comprising such a layer

Kochupurackal, J. B. P., Besling, W. F. A., Klootwijk, J. H., Wolters, R. A. M. & Roozeboom, F., 5 Nov 2009, Patent No. WO2009133500

Research output: PatentPatent publicationProfessional

nanoclusters
semiconductor devices
metal ions
assembling
yttrium

Method of manufacturing a capacitor on a nanowire and integrated circuit having such a capacitor

van Beek, J. T. M., Bakkers, E. P. A. M. & Roozeboom, F., 5 Nov 2009, Patent No. WO2009133510

Research output: PatentPatent publicationProfessional

Open Access
File
Nanowires
Integrated circuits
Capacitors
Metals
Catalysts

Method of manufacturing a semiconductor sensor device and semiconductor sensor device

Wunnicke, O., Bakkers, E. P. A. M. & Roest, A. L., 29 Oct 2009, Patent No. US20090267164

Research output: PatentPatent publicationProfessional

manufacturing
sensor
method
semiconductor
fill

Nanowire semiconductor device

Hijzen, E. A., Bakkers, E. P. A. M., Hueting, R. J. E. & Balkenende, A. R., 26 May 2009, Patent No. US7538337

Research output: PatentPatent publicationProfessional

semiconductor devices
nanowires
conduction

Process for the preparation of a conductive polymer composition

Hermant, M. C., Klumperman, L., Koning, C. E. & Schoot, van der, P., 18 Mar 2009, Patent No. EP2036941

Research output: PatentPatent publicationProfessional

Polymers
Chemical analysis
Latex
Carbon Nanotubes
Water

Semiconductor device and method of manufacturing the same

Hurkx, G. A. M., Agarwal, P., Balkenende, A. R., Magnee, P. H. C., Wagemans, M. M. H., Bakkers, E. P. A. M. & Hijzen, E. A., 13 Aug 2009, Patent No. US20090200641

Research output: PatentPatent publicationProfessional

Semiconductor devices
Semiconductor materials
Nanowires
Bipolar transistors
Patents and inventions

Semiconductor device with tunable energy band gap

Balkenende, A. R., Bakkers, E. P. A. M. & Feiner, L. F., 23 Jun 2009, Patent No. US7550755

Research output: PatentPatent publicationProfessional

Open Access
File
inventions
phase change materials
semiconductor devices
energy bands
semiconductor junctions

Trench capacitor and method for producing the same

Liu, J., Roest, A. L., Roozeboom, F. & Shabro, V., 3 Dec 2009, Patent No. WO2009144662

Research output: PatentPatent publicationProfessional

capacitors
capacitance
gels
permittivity
vacuum

Tunable radiation emitting semiconductor device

Bakkers, E. P. A. M. & Grabowski, S. P., 15 Dec 2009, Patent No. US7633081

Research output: PatentPatent publicationProfessional

Open Access
File
semiconductor devices
radiation
energy
charge carriers
electrodes
2008

A hydrogenated amorphous carbon coating

Creatore, M., Groenen, R., Singh, S. V., Sanden, van de, M. C. M. & van Hege, K., 14 Aug 2008, Patent No. WO2008095920

Research output: PatentPatent publicationProfessional

Amorphous carbon
Patents and inventions
Coatings
Deposits
Substrates

Apparatus and process for producing thin films and devices

Schropp, R. E. I., van der Werf, C. H. M. & Stannowski, B., 5 Jun 2008, IPC No. H01L 21/ 318 A I, Patent No. US2008128871, Priority date 3 Mar 2005, Priority No. WO2005EP02370

Research output: PatentPatent publicationProfessional

Open Access
File
thin films
filaments
film thickness
shutters
silicon nitrides

Blended polymer semiconductors

Sirringhaus, H., Goffri, S., Janssen, R. A. J., Radano, C. P., Smith, P., Muller, C., Wolfer, P. & Stutzmann, N., 3 Jan 2008, Patent No. WO 2008001123 A1

Research output: PatentPatent publicationProfessional

Semiconductor materials
Polymers
Binders
Polyethylenes