Department of Applied Physics

Research Output 1952 2020

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Patent publication
2019
2 Downloads (Pure)

Photovoltaic cell and a method for manufacturing the same

Kessels, E. & Black, L., 12 Sep 2019, Patent No. WO2019172770, Priority date 9 Mar 2018, Priority No. NL20182020560 20180309

Research output: PatentPatent publication

Open Access
File
Manufacturing
Cell
Passivation
Silicon
Covering
2018
17 Downloads (Pure)

Perovskite contacting passivating barrier layer for solar cells

Kuang, Y., Schropp, R. E. I., Koushik, D., Creatore, M. & Veenstra, S., 11 Jan 2018, IPC No. H01L 51/42 (2006.01), Patent No. WO2018007586A1, 7 Jul 2017, Priority date 7 Jul 2016, Priority No. 62359656

Research output: PatentPatent publication

Open Access
File
barrier layers
solar cells
electrons
electrodes
oxides
2017
9 Downloads (Pure)

A biosensor device and a method of manufacturing the same

Garcia Tello, P. & Roozeboom, F., 28 Nov 2017, IPC No. C40B 50/ 00 A I, Patent No. US9829485, Priority date 12 Nov 2008, Priority No. WO2008IB54732

Research output: PatentPatent publication

Open Access
File
bioinstrumentation
manufacturing
porosity
sensors
electromagnetic radiation
14 Downloads (Pure)

Apparatus and method for reactive ion etching

Roozeboom, F., Lankhorst, A. M., Poodt, P. W. G., Koster, N. B., Winands, G. J. J. & Vermeer, A. J. P. M., 12 Sep 2017, Patent No. US9761458, Priority date 12 Sep 2017, Priority No. EP20100154955 20100226

Research output: PatentPatent publication

Open Access
File
passivity
etching
ions
gases
cavities
21 Downloads (Pure)

Method and apparatus for depositing atomic layers on a substrate

Knaapen, R. J. W., Olieslagers, R., van den Berg, D., van den Boer, M. C., Maas, D. J., Donck, van der, J. C. J. J. & Roozeboom, F., 14 Feb 2017, IPC No. C23C 16/ 52 A I, Patent No. US9567671, Priority date 30 Jul 2012, Priority No. WO2012NL50540

Research output: PatentPatent publication

Open Access
File
gas supply
substrate
gas
trajectory
method
8 Downloads (Pure)

Method and apparatus for depositing atomic layers on a substrate

Vermeer, A. J. P. M., Roozeboom, F. & van Deelen, J., 31 Oct 2017, IPC No. C23C 16/ 52 A I, Patent No. US9803280, Priority date 21 Mar 2016, Priority No. US201615075341

Research output: PatentPatent publication

Open Access
File
gases
drums
supplying
43 Downloads (Pure)

Plasma atomic layer deposition

Knoops, H. C. M., de Peuter, K. & Kessels, W. M. M., 2 May 2017, Patent No. US9637823, Priority No. US201414231317 20140331

Research output: PatentPatent publication

Open Access
File
atomic layer epitaxy
impurities
silicon nitrides
refraction
modulation
2015
56 Downloads (Pure)

Plasma atomic layer deposition

Knoops, H. C. M., de Peuter, K. & Kessels, W. M. M., 1 Oct 2015, Patent No. US20150279681 (A1), Priority No. US201414231317 20140331

Research output: PatentPatent publication

Open Access
File
atomic layer epitaxy
impurities
silicon nitrides
refraction
modulation
2014
29 Downloads (Pure)

Direct band bap wurtzite semiconductor nanowires

Assali, S., Zardo, I., Haverkort, J. E. M. & Bakkers, E. P. A. M., 21 Aug 2014, Patent No. US2014230720

Research output: PatentPatent publication

Open Access
File
wurtzite
nanowires
crystal structure
zincblende
optoelectronic devices
46 Downloads (Pure)

Method for manufacturing a solar cell with a surface-passivating dielectric double layer, and corresponding solar cell

Schmidt, J. & Hoex, B., 27 Aug 2014, Patent No. EP2220689, Priority date 14 Nov 2007, Priority No. DE20071054384

Research output: PatentPatent publication

Open Access
File
manufacturing
aluminum oxides
solar cells
passivity
vapor deposition
57 Downloads (Pure)

Organic solar cell with a translucent top electrode and method for depositing such an electrode

Hannour, F., Palaniswamy, G., Janssen, R. A. J., Gupta, D. & Wienk, M. M., 19 Jun 2014, Patent No. WO2014090394

Research output: PatentPatent publication

Open Access
File
solar cells
electrodes
conductivity
accumulators
polymers
2013
24 Downloads (Pure)

Audio driver

Ouweltjes, O., Nieuwendijk, J. A. M., Kooijman, G. & Aarts, R. M., 19 Nov 2013, Patent No. US 8588449B2, Priority date 6 Apr 2010, Priority No. WO2010IB51481

Research output: PatentPatent publication

Open Access
File
Diaphragms
Air
Transducers
Acoustics
Acoustic waves
24 Downloads (Pure)

Supported polysilsesquioxane membrane and production thereof

Kreiter, R., Creatore, M., Cuperus, F. P., Vente, J. F. & Tchoua Ngamou, P. H., 10 May 2013, Patent No. WO2013066184 A1, Priority date 28 Apr 1956, Priority No. NL2011200770520111102

Research output: PatentPatent publication

Open Access
File
Silanes
Silicon
Membranes
Silicon Dioxide
Atoms
21 Downloads (Pure)

Through-substrate via and redistribution layer with metal paste

Roozeboom, F., Grunsven, van, E. C. E., Sanders, F. H. M. & Burghoorn, M. M. A., 12 Mar 2013, Patent No. US8395267

Research output: PatentPatent publication

Open Access
File
semiconductor devices
metals
masking
conductors
passivity
2012

Apparatus and process for producing thin films and devices

Schropp, R. E. I., van der Werf, C. H. M. & Stannowski, B., 15 Jan 2012, IPC No. H01L21/318 A I, Patent No. AT541065T, Priority date 12 Mar 2004, Priority No. EP20040075801

Research output: PatentPatent publication

thin films
filaments
inventions
shutters
silicon nitrides
32 Downloads (Pure)

Beam pulsing device for use in charged-particle microscopy

Kieft, E. R., Kiewiet, F. B., Lassise, A., Luiten, O. J., Mutsaers, P. H. A., Vredenbregt, E. J. D. & Henstra, A., 22 Oct 2012, Patent No. EP2722865

Research output: PatentPatent publication

Open Access
File
charged particles
microscopy
cavity resonators
holders
deflection
22 Downloads (Pure)

Hot wire chemical vapour deposition process for producing an inorganic-polymer multi-layer stack

Schropp, R. E. I., Spee, D. A., Rath, J. K. & van der Werf, C. H. M., 6 Dec 2012, IPC No. H01L 51/ 00 A I, Patent No. WO2012165944, Priority date 27 May 2011, Priority No. US201161490604P

Research output: PatentPatent publication

Open Access
File
Inorganic polymers
Chemical vapor deposition
Wire
Patents and inventions
Polymers
46 Downloads (Pure)

Plasma pre-treatment

Potts, S. E. & Kessels, W. M. M., 13 Dec 2012, Patent No. WO2012168248, Priority date 6 Jun 2011, Priority No. US201161520175P

Research output: PatentPatent publication

Open Access
File
atomic layer epitaxy
pretreatment
metals
thin films
metal nitrides
25 Downloads (Pure)

Process for the preparation of a conductive polymer composition

Koning, C. E., Tkalya, E. & Schoot, van der, P. P. A. M., 1 Nov 2012, Patent No. WO2012146703, Priority date 27 Apr 2011, Priority No. EP20110003445

Research output: PatentPatent publication

Open Access
File
Polymers
Chemical analysis
Water
Latex
Patents and inventions
22 Downloads (Pure)

Wire-type waveguide for TeraHertz radiation

Tripodi, L., Gomez Rivas, J., Leuven, van, P. G., Beurden, van, M. C., Berrier, A. & Matters - Kammerer, M., 19 Apr 2012, Patent No. WO2012049587

Research output: PatentPatent publication

Open Access
File
electromagnetic radiation
wire
waveguides
radiation
bandwidth
2011
30 Downloads (Pure)

Device, system and method for the measurement of a vapor transmission rate through a film of permeable material

Goosen, J., Qian, L., Sanden, van de, M. C. M., van Beek, J. T. M. & Kamminga, J. D., 20 Sep 2011, Patent No. NL2004419, Priority date 17 Mar 2010, Priority No. NL20102004419

Research output: PatentPatent publication

Open Access
File
vapors
1 Downloads (Pure)

Device and method for generating a plasma discharge for patterning the surface of a substrate

Blom, P. M., Stevens, A. A. E., Huijbregts, L., De Haan, H. A. M., Van Schijndel, A. H., Te Sligte, E., Van Hijningen, C. J. & Huiskamp, T., 25 Aug 2011, Patent No. WO2011102711 (A1), Priority date 17 Feb 2010, Priority No. WO2010NL50079

Research output: PatentPatent publication

plasma jets
electrodes
positioning
high voltages
2010
22 Downloads (Pure)

3D electrochemical device

Verhaegh, N. A. M., Klootwijk, J. H., Besling, W. F. A., Niessen, R. A. H., Lamy, Y., Roozeboom, F. & Notten, P. H. L., 22 Apr 2010, Patent No. WO2010043991

Research output: PatentPatent publication

Open Access
File
Lithium
Etching
Ions
Plasma CVD
Electrodes
1 Downloads (Pure)

Interfaces and method for wireless-optical and optical-wireless conversion

Patarata Romeira, B. M., Figueiredo, J. M. L., Ironside, C. N. & Slight, T. J., 14 May 2010, Patent No. WO2010052481-A1

Research output: PatentPatent publication

oscillators
optical communication
output
resonant tunneling diodes
synchronism
28 Downloads (Pure)

Method for forming microscopic structures on a substrate

Jong, de, A. F., Mulders, J. J. L., Kessels, W. M. M. & Mackus, A. J. M., 24 Jun 2010, Patent No. US2010159370

Research output: PatentPatent publication

Open Access
File
seeds
inventions
particle beams
atomic layer epitaxy
vapor deposition
19 Downloads (Pure)

Method for passivating at least a part of a substrate surface

Illiberi, A., Hoex, B., Kessels, W. M. M. & Sanden, van de, M. C. M., 9 Dec 2010, Patent No. WO2010140889

Research output: PatentPatent publication

Open Access
File
chambers
nozzles
passivity
supersonic speed
injection
26 Downloads (Pure)

Method of plating through wafer vias in a wafer for 3d packaging

Besling, W. F. A., Roozeboom, F. & Lamy, Y., 15 Apr 2010, Patent No. WO2010041165

Research output: PatentPatent publication

Open Access
File
Plating
Metal foil
Seed
Packaging
Substrates
27 Downloads (Pure)

Microphone

Langereis, G., Lippen, van, T., Roozeboom, F., Suy, H., Reimann, K., van Beek, J. T. M., Avoort, van der, C., Wingerden, van, J., Phan, le, K., Goossens, M. & Steeneken, P. G., 28 Oct 2010, Patent No. WO2010122487

Research output: PatentPatent publication

Open Access
File
Membranes
Acoustics
Noise
Suspensions
21 Downloads (Pure)

Planar, monolithically integrated coil

Roozeboom, F., Reefman, D., Klootwijk, J. H., Tiemeijer, L. F. & Ruigrok, J., 7 Jan 2010, Patent No. WO2010001339

Research output: PatentPatent publication

Open Access
File
Inductance
Patents and inventions
Shielding
Silicon
Power management
20 Downloads (Pure)

Robust high aspect ratio semiconductor device

Roozeboom, F., Goossens, M., Besling, W. F. A. & Verhaegh, N. A. M., 8 Apr 2010, Patent No. WO2010038174

Research output: PatentPatent publication

Open Access
File
reinforcement
semiconductor
cross section
22 Downloads (Pure)

Semiconductor apparatus and method of fabrication for a semiconductor apparatus

Engelhart, P., Seguin, R., Kessels, W. M. M. & Dingemans, G., 23 Dec 2010, Patent No. WO2010145648

Research output: PatentPatent publication

Open Access
File
fabrication
passivity
surface layers
inventions
solar cells
20 Downloads (Pure)

Semiconductor sensor device, diagnostic instrument comprising such a device and method of manufacturing such a device

Kahya, M. N. & Bakkers, E. P. A. M., 28 Jan 2010, Patent No. US2010019226

Research output: PatentPatent publication

Open Access
File
manufacturing
sensors
mesas
inventions
conduction
21 Downloads (Pure)

Solar cell

Dingemans, G., Engelhart, P., Kessels, W. M. M. & Wanka, S., 24 Jun 2010, Patent No. WO2010070013

Research output: PatentPatent publication

Open Access
File
solar cell
tunnel
semiconductor
material
20 Downloads (Pure)

Solar Cell

Engelhart, P., Wanka, S., Dingemans, G. & Kessels, W. M. M., 24 Jun 2010, Patent No. WO2010070015

Research output: PatentPatent publication

Open Access
File
inversion layer
solar cell
semiconductor
material
25 Downloads (Pure)

Substrate structure grown by plasma deposition

Vries, de, H. W. & Sanden, van de, M. C. M., 16 Dec 2010, Patent No. WO2010142972

Research output: PatentPatent publication

Open Access
File
exponents
scaling
plasma layers
roughness
25 Downloads (Pure)

Through-substrate via and redistribution layer with metal paste

Roozeboom, F., Grunsven, van, E. C. E., Sanders, F. H. M. & Burghoorn, M. M. A., 6 May 2010, Patent No. WO2010049852

Research output: PatentPatent publication

Open Access
File
semiconductor devices
inventions
metals
masking
conductors
26 Downloads (Pure)

Two layer barrier on polymeric substrate

Vries, de, H. W. & Sanden, van de, M. C. M., 19 Aug 2010, Patent No. WO2010092383

Research output: PatentPatent publication

Open Access
File
barrier layers
inorganic materials
gas composition
power supplies
plasma control
2009

A biosensor device and a method of manufacturing the same

Garcia Tello, P. & Roozeboom, F., 22 May 2009, Patent No. WO2009063408

Research output: PatentPatent publication

bioinstrumentation
manufacturing
porosity
sensors
electromagnetic radiation

Debris prevention system, radiation system, and lithograpic apparatus

Herpen, van, M. W., Soer, W. A. & Gielissen, K., 22 Jan 2009, Patent No. US2009021705

Research output: PatentPatent publication

transmittance
radiation

Electronic device and method of manufacturing an electronic device

Roozeboom, F., Lifka, H., Vanhelmont, F. & Dekkers, W., 26 Nov 2009, Patent No. US20090289265

Research output: PatentPatent publication

Organic light emitting diodes (OLED)
Semiconductor materials

Enhanced surface area structure

Kochupurackal, J. B. P., Roozeboom, F., Klootwijk, J. H. & Dekkers, W., 17 Dec 2009, Patent No. WO2009150600

Research output: PatentPatent publication

Capacitors
Electrodes
9 Downloads (Pure)

Lithographic apparatus and device manufacturing method

Herpen, van, M. W., Banine, V. Y., Kuster, de, J. P. H., Moors, R., Stevens, L. H. J., Wolschrijn, B. T., Sidelnikov, Y., Velden, van der, M. H., Soer, W. A., Stein, T. & Gielissen, K., 9 Jul 2009, Patent No. US2009173360

Research output: PatentPatent publication

manufacturing
radiation
detectors
electron emission
dosage
37 Downloads (Pure)

Method for manufacturing a multi-layer stack structure with improved WVTR barrier property

Vries, de, H. & Sanden, van de, M. C. M., 13 Aug 2009, Patent No. WO2009099325

Research output: PatentPatent publication

Open Access
File
manufacturing
barrier layers
adhesives
glow discharges
atmospheric pressure
28 Downloads (Pure)

Method for manufacturing an electric device with a layer of conductive material contracted by nanowire

van Schaijk, R. T. F., Agarwal, P., Bakkers, E. P. A. M., Lankhorst, M. H. R., Duuren, M. J., Balkenende, A. R., Feiner, L. F. & Woerlee, P. H., 13 Aug 2009, Patent No. US20090200536

Research output: PatentPatent publication

Open Access
File
Conductive materials
Nanowires
Data storage equipment
Patents and inventions
Phase change materials

Method of forming a nanocluster comprising dielectric layer and device comprising such a layer

Kochupurackal, J. B. P., Besling, W. F. A., Klootwijk, J. H., Wolters, R. A. M. & Roozeboom, F., 5 Nov 2009, Patent No. WO2009133500

Research output: PatentPatent publication

nanoclusters
semiconductor devices
metal ions
assembling
yttrium
31 Downloads (Pure)

Method of manufacturing a capacitor on a nanowire and integrated circuit having such a capacitor

van Beek, J. T. M., Bakkers, E. P. A. M. & Roozeboom, F., 5 Nov 2009, Patent No. WO2009133510

Research output: PatentPatent publication

Open Access
File
Nanowires
Integrated circuits
Capacitors
Metals
Catalysts
1 Downloads (Pure)

Method of manufacturing a semiconductor sensor device and semiconductor sensor device

Wunnicke, O., Bakkers, E. P. A. M. & Roest, A. L., 29 Oct 2009, Patent No. US20090267164

Research output: PatentPatent publication

manufacturing
sensor
method
semiconductor
fill
21 Downloads (Pure)

Microelectronic sensor device for optical examinations in a sample medium

Verschuren, C. A., Prins, M. W. J. & Immink, A. H. J., 12 Feb 2009, Patent No. WO2009019619

Research output: PatentPatent publication

Open Access
File
light beams
microelectronics
examination
refractivity
sensors

Nanowire semiconductor device

Hijzen, E. A., Bakkers, E. P. A. M., Hueting, R. J. E. & Balkenende, A. R., 26 May 2009, Patent No. US7538337

Research output: PatentPatent publication

semiconductor devices
nanowires
conduction

Process for the preparation of a conductive polymer composition

Hermant, M. C., Klumperman, L., Koning, C. E. & Schoot, van der, P., 18 Mar 2009, Patent No. EP2036941

Research output: PatentPatent publication

Polymers
Chemical analysis
Latex
Carbon Nanotubes
Water