Department of Applied Physics

Research Output 1952 2019

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Editorial
2018

Editorial for plasma diagnostics using spectroscopic methods

Sasaki, K., Engeln, R. & Barnat, E. V., 2018, In : Journal of Physics D: Applied Physics. 51, 4, 3 p., 040202

Research output: Contribution to journalEditorialAcademicpeer-review

Open Access
File

Preface

Roozeboom, F., Timans, P. J., Kakushima, K., Jagannathan, H., Karim, Z., Gusev, E. P. & De Gendt, S., 1 Jan 2018, In : ECS Transactions. 85, 6, p. iii 1 p.

Research output: Contribution to journalEditorialAcademicpeer-review

2017

Preface: atomic layer deposition application 13

Roozeboom, F., de Gendt, S., Elam, J. W., van der Straten, O., Dendooven, J. & Liu, C., 1 Oct 2017, In : ECS Transactions. 80, 3, p. III-IV 2 p.

Research output: Contribution to journalEditorialAcademicpeer-review

Preface: Silicon compatible materials, processes, and technologies for advanced integrated circuits and emerging applications 7

Roozeboom, F., Jagannathan, H., Kakushima, K., Timans, P. J., Gusev, E. P., Karim, Z. & de Gendt, S., 1 Jan 2017, In : ECS Transactions. 77, 5, p. iii-iv

Research output: Contribution to journalEditorialAcademicpeer-review

Special issue on integrated quantum photonics (editorial)

Vamivakas, A. N., Sergienko, A. V. & Fiore, A., 1 Aug 2017, In : Journal of Optics (United Kingdom). 19, 8, p. 1-2 080403

Research output: Contribution to journalEditorialAcademicpeer-review

Open Access
2016

Preface: Silicon compatible materials, processes, and technologies for advanced integrated circuits and emerging applications 6

Roozeboom, F., Narayanan, V., Kakushima, K., Timans, P. J., Gusev, E. P., Karim, Z. & de Gendt, S., 2 Jun 2016, In : ECS Transactions. 72, 4, p. III-IV

Research output: Contribution to journalEditorialAcademicpeer-review

Preface: atomic layer deposition applications 12

Roozeboom, F., de Gendt, S., Elam, J. W., van der Straten, O., Dendooven, J., Liu, C. & Huffmann, C., 2 Oct 2016, In : ECS Transactions. 75, 6, p. III-IV

Research output: Contribution to journalEditorialAcademicpeer-review

Special issue : Plasma processing of materials for energy conversion and storage

Creatore, M. & Milella, A., Jan 2016, In : Plasma Processes and Polymers. 13, 1, p. 8-9

Research output: Contribution to journalEditorialAcademicpeer-review

Open Access
File
1 Citation (Scopus)
Open Access
2015

Plasma processing: foreword: Plasma processing

Sasaki, K., Barnat, E. V., Engeln, R., Higashi, S., Ishijima, T., Ito, M., Ito, T., Kinoshita, K., Kurihara, K., Nakano, T., Nunomura, S., Pu, Y. K., Sakai, O. & Sato, T., 1 Jan 2015, In : Japanese Journal of Applied Physics, Part 1 : Regular Papers and Short Notes & Review Papers. 54, 1 Supplement, 1 p., 01A001

Research output: Contribution to journalEditorialAcademicpeer-review

Open Access

Preface: Atomic Layer Deposition Applications 11

Roozeboom, F., De Gendt, S., Delabie, A., Elam, J. W., van der Straten, O. & Huffmann, C., 11 Oct 2015, In : ECS Transactions. 69, 7, p. III-IV

Research output: Contribution to journalEditorialAcademicpeer-review

Preface: Processing Materials of 3D Interconnects, Damascene and Electronics Packaging 7

Kondo, K., Mathad, S., Akolkar, R., Dow, W. P., Philipsen, H., Hayase, M., Koyanagi, M., Kaneko, Y. & Roozeboom, F., 11 Oct 2015, In : ECS Transactions. 69, 6, p. III-IV

Research output: Contribution to journalEditorialAcademicpeer-review

Preface: Silicon Compatible Materials, Processes, and Technologies for Advanced Integrated Circuits and Emerging Applications 5

Roozeboom, F., Narayanan, V., Kakushima, K., Timans, P. J., Gusev, E. P., Karim, Z. & De Gendt, S., 24 May 2015, In : ECS Transactions. 66, 4, p. III-IV

Research output: Contribution to journalEditorialAcademicpeer-review

2014

Atomic-scale engineering of multifunctional nano-sized materials and films

Roozeboom, F., Barreca, D., Devi, A., Parala, H. & Ritala, M., 1 Feb 2014, In : Physica Status Solidi (A) Applications and Materials Science. 211, 2, p. 249-250 2 p.

Research output: Contribution to journalEditorialAcademicpeer-review

Open Access
engineering

Preface

Roozeboom, F., de Gendt, S., Delabie, A., Elam, J. W., Londergan, A. & van der Straten, O., 2014, In : ECS Transactions. 64, 9, p. III

Research output: Contribution to journalEditorialAcademicpeer-review

Preface

Roozeboom, F., Narayanan, V., Kakushima, K., Timans, P. J., Gusev, E. P., Kohl, P. A. & Leonte, O. M., 2014, In : ECS Transactions. 61, 3, p. III-IV

Research output: Contribution to journalEditorialAcademicpeer-review

8 Citations (Scopus)

Preface to the CVD special issue : atomic-scale-engineered materials (ASEM)

Devi, A. & Kessels, W. M. M., 2014, In : Chemical Vapor Deposition. 20, 7-8-9, p. 186-188

Research output: Contribution to journalEditorialAcademicpeer-review

Chemical vapor deposition
vapor deposition
2013

Preface: Processing Materials of 3D Interconnects, Damascene and Electronics Packaging 4

Kondo, K., Podlaha-Murphy, E., Mathad, G. S. & Roozeboom, F., 1 Jan 2013, In : ECS Transactions. 50, 32, p. III-IV

Research output: Contribution to journalEditorialAcademicpeer-review

Preface

Roozeboom, F., Narayanan, V., Kakushima, K., Iwai, H., Kwong, D. L., Timans, P. J. & Gusev, E. P., 21 Oct 2013, In : ECS Transactions. 53, 3, p. iii-iv

Research output: Contribution to journalEditorialAcademicpeer-review

Preface

Roozeboom, F., De Gendt, S., Delabie, A., Elam, J. W., Londergan, A. & Van Der Straten, O., 1 Jan 2013, In : ECS Transactions. 58, 10, p. iii 1 p.

Research output: Contribution to journalEditorialAcademicpeer-review

2012

Preface

Roozeboom, F., Narayanan, V., Kakushima, K., Kwong, D. L., Iwai, H., Gusev, E. P. & Timans, P. J., 19 Nov 2012, In : ECS Transactions. 45, 6, p. iii-iv 2 p.

Research output: Contribution to journalEditorialAcademicpeer-review

Preface: Atomic Layer Deposition Applications 8

Elam, J. W., De Gendt, S., Londergan, A., Bent, S. F., van der Straten, O., Delabie, A. & Roozeboom, F., 1 Jan 2012, In : ECS Transactions. 50, 13, p. III-IV

Research output: Contribution to journalEditorialAcademicpeer-review

Preface

Kondo, K., Akolkar, R. N., Misra, D., Roozeboom, F. & Koyanagi, M., 1 Dec 2012, In : ECS Transactions. 41, 43

Research output: Contribution to journalEditorialAcademicpeer-review

Preface : Tenth Carolus Magnus Summer School on plasma and fusion energy physics

Jaspers, R. J. E., 2012, In : Fusion Science and Technology. 61, 2T, p. vii-vii 1 p.

Research output: Contribution to journalEditorialAcademicpeer-review

Open Access
File
summer
Fusion reactions
Physics
fusion
Plasmas

Tenth Carolus Magnus Summer School on plasma and fusion energy physics preface

Jaspers, R. J. E., 2012, In : Fusion Science and Technology. 61, 2T, p. VII-VII

Research output: Contribution to journalEditorialAcademicpeer-review

2011

ECS Transactions: Preface

Roozeboom, F., Iwai, H., Kwong, D. L., Öztürk, M. C., Timans, P. J., Narayanan, V. & Gusev, E. P., 1 Aug 2011, In : ECS Transactions. 35, 2

Research output: Contribution to journalEditorialAcademicpeer-review

Preface: Atomic Layer Deposition Applications 7

Elam, J. W., De Gendt, S., Londergan, A., Bent, S. F., van der Straten, O., Delabie, A. & Roozeboom, F., 1 Jan 2011, In : ECS Transactions. 41, 2, p. III-IV

Research output: Contribution to journalEditorialAcademicpeer-review

Open Access
File
1 Citation (Scopus)

Special Issue on advanced and emerging light sources

Haverlag, M., Kroesen, G. M. W. & Ferguson, I., 2011, In : Journal of Physics D: Applied Physics. 44, 22, p. 220301-1-3 1 p., 220301

Research output: Contribution to journalEditorialAcademicpeer-review

Metal halide lamps
luminaires
Electric lamps
Light emitting diodes
Light sources
2010

ECS Transactions: Preface

Flake, J., Ritzdorf, T., Koyangi, M., Leonte, O., Mathad, G. S., Ramm, P., Rathore, H. S. & Roozeboom, F., 1 Dec 2010, In : ECS Transactions. 33, 12, p. iii-vi 3 p.

Research output: Contribution to journalEditorialAcademicpeer-review

ECS Transactions: preface

Gusev, E. P., Iwai, H., Kwong, D. L., Roozeboom, F., Öztürk, M. C., Timans, P. J. & Narayanan, V., 30 Dec 2010, In : ECS Transactions. 28, 1, p. iii-x 7 p.

Research output: Contribution to journalEditorialAcademicpeer-review

Preface: Processing, Materials, and Integration of Damascene and 3D Interconnects

Flake, J. C., Roozeboom, F., Ramm, P., Mathad, G. S., Rathore, H. S. & Leonte, O. M., 1 Dec 2010, In : ECS Transactions. 25, 38

Research output: Contribution to journalEditorialAcademicpeer-review

Preface: Atomic Layer Deposition Applications 6

Elam, J. W., Roozeboom, F., Delabie, A., Van Der Straten, O., Bent, S. F., De Gendt, S. & Londergan, A., 1 Dec 2010, In : ECS Transactions. 33, 2, p. iii

Research output: Contribution to journalEditorialAcademicpeer-review

Open Access
File
2009

ECS Transactions: preface

Narayanan, V., Roozeboom, F., Kwong, D. L., Iwai, H., Gusev, E. P. & Timans, P. J., 1 Dec 2009, In : ECS Transactions. 19, 1

Research output: Contribution to journalEditorialAcademicpeer-review

2008

Preface: Advanced Gate Stack, Source/Drain, and Channel Engineering for Si-Based CMOS 4: New Materials, Processes, and Equipment

Timans, P. J., Kwong, D. L., Iwai, H., Gusev, E. P., Roozeboom, F. & Öztürk, M., 13 Nov 2008, In : ECS Transactions. 13, 1, p. iii 1 p.

Research output: Contribution to journalEditorialAcademicpeer-review

Open Access
File

Preface : Advanced gate stack, source/drain and channel engineering for Si-based CMOS 4 : new materials, processes and equipment

Timans, P. J., Kwong, D-L., Iwai, H., Gusev, E. P., Roozeboom, F. & Öztürk, M., 2008, In : ECS Transactions. 13, 1, p. III- 1 p.

Research output: Contribution to journalEditorialAcademic

Open Access
File
2006

Preface: Advanced Gate Stack, Source/Drain, and Channel Engineering for Si-Based CMOS 2: New Materials, Processes, and Equipment

Roozeboom, F., Timans, P. J., Öztürk, M. C., Iwai, H., Kwong, D. L. & Gusev, E. P., 1 Dec 2006, In : ECS Transactions. 3, 2, p. iii 1 p.

Research output: Contribution to journalEditorialAcademicpeer-review

Open Access
File