Projects per year
Organisation profile
Introduction / mission
This Lab focusses on control techniques in lithographic scanners, in particular related to high-accuracy positioning systems.
Organisation profile
A distinction can be made based on motion range (“long” indicating meter-scale, “short” indicating mm scale), and accuracy (micrometer or sub-nanometer). Long-range actuators typically have a moderate accuracy but suffer from nonlinearities like friction, requiring compensation methods using adaptive or learning techniques. Nonlinearities also play a role when using piezo materials for actuation in high-accuracy applications, possibly simultaneously with using the material as sensor (“self-sensing”). Finally, control techniques to improve sub-nanometer positioning systems have to deal with position dependency, in particular in the observation of dynamic modes in the measurement system. This has led to position-dependent observers creating the option of increasing control bandwidth.
UN Sustainable Development Goals
In 2015, UN member states agreed to 17 global Sustainable Development Goals (SDGs) to end poverty, protect the planet and ensure prosperity for all. Our work contributes towards the following SDG(s):
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SDG 3 Good Health and Well-being -
SDG 7 Affordable and Clean Energy -
SDG 9 Industry, Innovation, and Infrastructure -
SDG 13 Climate Action
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Dive into the research topics where Control of high-precision mechatronic systems is active. These topic labels come from the works of this organisation's members. Together they form a unique fingerprint.
Collaborations and top research areas from the last five years
Recent external collaboration on country/territory level. Dive into details by clicking on the dots or
Profiles
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Clarisse Bosman Barros, MSc
- Electrical Engineering, Control of high-precision mechatronic systems
- Electrical Engineering, Machine Learning for Modelling and Control
- Electrical Engineering, Control Systems - Doctoral Candidate
Person: Prom. : doctoral candidate (PhD), Prom. : doctoral candidate (PhD)
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Roland Tóth
- Electrical Engineering, Control Systems - Full Professor
- EAISI High Tech Systems - Full Professor
- Electrical Engineering, Control of high-precision mechatronic systems
- Electrical Engineering, Machine Learning for Modelling and Control
- Electrical Engineering, Autonomous Motion Control Lab
Person: HGL : Professor, UHD : Associate Professor
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Siep Weiland
- Electrical Engineering, Control of high-precision mechatronic systems
- Electrical Engineering, Spatial-Temporal Systems for Control
- Electrical Engineering, Control Systems - Full Professor
- EAISI High Tech Systems - Full Professor
- EAISI Foundational - Full Professor
Person: HGL : Professor
Projects
- 10 Finished
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Advanced piezo-electric water stage
Nawijn, H. (Project communication officer), van der Hagen, D. (Project communication officer), Tóth, R. (Project Manager), Van den Hof, P. M. J. (Project member), Bosman Barros, C. (Project member) & Butler, H. (Project member)
1/01/18 → 30/11/25
Project: Third tier
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APROCS: Automated Linear Parameter-Varying Modeling and Control Synthesis for Nonlinear Complex Systems
Tóth, R. (Project Manager), Tóth, R. (Project member), Schoukens, M. (Project member), Bloemers, T. A. H. (Project member), Koelewijn, P. J. W. (Project member), Nawijn, H. (Project communication officer), Iacob, L. C. (Project member) & van der Hagen, D. (Project communication officer)
1/09/17 → 31/03/23
Project: Research direct
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Impuls II: Identification and control of thermal effects in printing systems
Weiland, S. (Project Manager), Das, A. (Project member), Nawijn, H. (Project communication officer) & van der Hagen, D. (Project communication officer)
1/09/16 → 31/08/20
Project: Research direct
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Eco-driving in Action: Modeling, Experimental Validation and Numerical Methods for Energy Efficient Driving
Heuts, Y. J. J., 16 Jun 2026, Eindhoven: Eindhoven University of Technology. 195 p.Research output: Thesis › Phd Thesis 1 (Research TU/e / Graduation TU/e)
Open AccessFile -
Learning Subsystem Dynamics in Nonlinear Systems via Port-Hamiltonian Neural Networks
van Otterdijk, G. J. E., Moradi, S., Weiland, S., Tóth, R., Jaensson, N. O. & Schoukens, M., 12 Jan 2026, 2025 IEEE 64th Conference on Decision and Control, CDC 2025. Institute of Electrical and Electronics Engineers, p. 2071-2076 6 p. 11312257Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review
Open AccessFile1 Link opens in a new tab Citation (Scopus)5 Downloads (Pure) -
Output-Error Port-Hamiltonian Neural Networks for Data-Driven Identification of Nonlinear Dynamical Systems
Moradi, S., 2 Jul 2026, Eindhoven: Eindhoven University of Technology. 119 p.Research output: Thesis › Phd Thesis 1 (Research TU/e / Graduation TU/e)
Open AccessFile
Datasets
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A Global Optimal Solution to the Eco-Driving Problem
Padilla Cazar, G. P. (Creator), Weiland, S. (Creator) & Donkers, M. C. F. (Creator), Technische Universiteit Eindhoven, 14 Jun 2018
DOI: 10.4121/uuid:9e24298e-6f39-4e6f-8ef0-f8d6effa029d, https://data.4tu.nl/articles/_/12708830/1
Dataset
Prizes
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Best Student Paper Award IFAC CAO 2022
Bolderman, M. (Recipient), Fan, D. (Recipient), Lazar, M. (Recipient) & Butler, H. (Recipient), 2022
Prize: Other › Career, activity or publication related prizes (lifetime, best paper, poster etc.) › Scientific
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Journal of Process Control Paper Prize Award 2020-Survey Category
Saltik, M. B. (Recipient), Özkan, L. (Recipient), Ludlage, J. H. A. (Recipient), Weiland, S. (Recipient) & Van den Hof, P. M. J. (Recipient), 2020
Prize: Other › Career, activity or publication related prizes (lifetime, best paper, poster etc.) › Scientific
Press/Media
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US Patent Issued to ASML Netherlands on Oct. 17 for "Object positioning system diagnostic and calibration methods positioning control method lithographic apparatus and device manufacturing method" (Dutch, Belgian Inventors)
18/10/23
1 item of Media coverage
Press/Media: Expert Comment
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ASML Netherlands Seeks Patent for Lithographic Apparatus and Device Manufacturing Method
17/10/23
1 item of Media coverage
Press/Media: Expert Comment
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Studies from Institute for Computer Science and Control Update Current Data on Technology (Backflipping With Miniature Quadcopters By Gaussian-process-based Control and Planning)
13/09/23
1 item of Media coverage
Press/Media: Expert Comment
Student theses
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A Control Lyapunov and Barrier function approach to safe stabilization of nonlinear systems with application to cancer treatment
van Gemert, J. J. H. (Author), Lazar, M. (Supervisor 1) & Weiland, S. (Supervisor 2), 7 Dec 2023Student thesis: Master
File -
Active damping for charge driven piezoelectric nanopositioning stage using self sensing control
Di Filippo, R. (Author), Weiland, S. (Supervisor 1), Butler, H. (Supervisor 2), Jansen, B. (External coach) & Vandervelden, R. (External coach), 19 Sept 2018Student thesis: Master
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Adaptive friction compensation for an industrial coreless linear motor setup
van den Boom, P. W. M. (Author), Nguyen, T. (Supervisor 1), Lazar, M. (Supervisor 2) & Butler, H. (Supervisor 2), 13 Dec 2018Student thesis: Master