Control of high-precision mechatronic systems

Organization profile

Introduction / mission

This Lab focusses on control techniques in lithographic scanners, in particular related to high-accuracy positioning systems.

Organisational profile

A distinction can be made based on motion range (“long” indicating meter-scale, “short” indicating mm scale), and accuracy (micrometer or sub-nanometer). Long-range actuators typically have a moderate accuracy but suffer from nonlinearities like friction, requiring compensation methods using adaptive or learning techniques. Nonlinearities also play a role when using piezo materials for actuation in high-accuracy applications, possibly simultaneously with using the material as sensor (“self-sensing”). Finally, control techniques to improve sub-nanometer positioning systems have to deal with position dependency, in particular in the observation of dynamic modes in the measurement system. This has led to position-dependent observers creating the option of increasing control bandwidth.

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Research Output 2012 2020

Heterogeneously parameterized tube model predictive control for LPV systems

Hanema, J., Lazar, M. & Tóth, R., 1 Jan 2020, In : Automatica. 111, 13 p., 108622

Research output: Contribution to journalArticleAcademicpeer-review

Model predictive control
Parameterization
Costs

Active compensation of the deformation of a magnetically levitated mover of a planar motor

Custers, C., Proimadis, I., Jansen, J. W., Butler, H., Toth, R., Lomonova, E. & Van den Hof, P., 2019, 2019 IEEE International Electric Machines & Drives Conference (IEMDC). Piscataway: Institute of Electrical and Electronics Engineers, p. 854-861 8785302

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Open Access
File
commutation
coils
flexible bodies
translators
stators

A distributed optimization approach for complete vehicle energy management

Romijn, T. C. J., Donkers, M. C. F., Kessels, J. T. B. A. & Weiland, S., May 2019, In : IEEE Transactions on Control Systems Technology. 27, 3, p. 964-980

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
Energy management
Trucks
Climate control
Convex optimization
Fuel consumption

Student theses

Active damping for charge driven piezoelectric nanopositioning stage using self sensing control

Author: Di Filippo, R., 19 Sep 2018

Supervisor: Weiland, S. (Supervisor 1), Butler, H. (Supervisor 2), Jansen, B. (External coach) & Vandervelden, R. (External person) (External coach)

Student thesis: Master

Adaptive friction compensation for an industrial coreless linear motor setup

Author: van den Boom, P., 13 Dec 2018

Supervisor: Nguyen, T. (Supervisor 1), Lazar, M. (Supervisor 2) & Butler, H. (Supervisor 2)

Student thesis: Master

Adaptive port-Hamiltonian discretization of distributed parameter systems

Author: Meijer, T., 25 Oct 2018

Supervisor: Weiland, S. (Supervisor 1) & van den Hurk, D. (Supervisor 2)

Student thesis: Master