Research Output per year
Organization profile
Introduction / mission
This Lab focusses on control techniques in lithographic scanners, in particular related to high-accuracy positioning systems.
Organisational profile
A distinction can be made based on motion range (“long” indicating meter-scale, “short” indicating mm scale), and accuracy (micrometer or sub-nanometer). Long-range actuators typically have a moderate accuracy but suffer from nonlinearities like friction, requiring compensation methods using adaptive or learning techniques. Nonlinearities also play a role when using piezo materials for actuation in high-accuracy applications, possibly simultaneously with using the material as sensor (“self-sensing”). Finally, control techniques to improve sub-nanometer positioning systems have to deal with position dependency, in particular in the observation of dynamic modes in the measurement system. This has led to position-dependent observers creating the option of increasing control bandwidth.
Network
Recent external collaboration on country level. Dive into details by clicking on the dots.
Profiles
Clarisse Bosman Barros, MSc
- Department of Electrical Engineering, Control Systems - Doctoral Candidate
- Department of Electrical Engineering, Control of high-precision mechatronic systems
- Department of Electrical Engineering, Machine Learning for Modelling and Control
Person: Prom. : doctoral candidate (PhD)
Hans Butler
- Department of Electrical Engineering, Control Systems - Full Professor
- Department of Electrical Engineering, Control of high-precision mechatronic systems
Person: HGL : Professor
Yanin Kasemsinsup, MSc
- Department of Electrical Engineering, Control Systems - Former Doctoral Candidate
- Department of Electrical Engineering, Control of high-precision mechatronic systems
Person: Prom. : doctoral candidate (PhD), Unknown
Research Output 2012 2020
Heterogeneously parameterized tube model predictive control for LPV systems
Hanema, J., Lazar, M. & Tóth, R., 1 Jan 2020, In : Automatica. 111, 13 p., 108622Research output: Contribution to journal › Article › Academic › peer-review
Model predictive control
Parameterization
Costs
Active compensation of the deformation of a magnetically levitated mover of a planar motor
Custers, C., Proimadis, I., Jansen, J. W., Butler, H., Toth, R., Lomonova, E. & Van den Hof, P., 2019, 2019 IEEE International Electric Machines & Drives Conference (IEMDC). Piscataway: Institute of Electrical and Electronics Engineers, p. 854-861 8785302Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review
Open Access
File
commutation
coils
flexible bodies
translators
stators
A distributed optimization approach for complete vehicle energy management
Romijn, T. C. J., Donkers, M. C. F., Kessels, J. T. B. A. & Weiland, S., May 2019, In : IEEE Transactions on Control Systems Technology. 27, 3, p. 964-980Research output: Contribution to journal › Article › Academic › peer-review
Open Access
File
Energy management
Trucks
Climate control
Convex optimization
Fuel consumption
Press / Media
WIPO PUBLISHES PATENT OF ASML NETHERLANDS FOR "ELECTRON BEAM INSPECTION APPARATUS STAGE POSITIONING" (DUTCH, AMERICAN INVENTORS)
22/04/19
1 item of media coverage
Press/Media: Expert Comment
WIPO PUBLISHES PATENT OF ASML NETHERLANDS FOR "SUPPORT STRUCTURE, METHOD AND LITHOGRAPHIC APPARATUS" (DUTCH INVENTOR)
29/10/18
1 item of media coverage
Press/Media: Expert Comment
Student theses
Active damping for charge driven piezoelectric nanopositioning stage using self sensing control
Author: Di Filippo, R., 19 Sep 2018Supervisor: Weiland, S. (Supervisor 1), Butler, H. (Supervisor 2), Jansen, B. (External coach) & Vandervelden, R. (External person) (External coach)
Student thesis: Master
Adaptive friction compensation for an industrial coreless linear motor setup
Author: van den Boom, P., 13 Dec 2018Supervisor: Nguyen, T. (Supervisor 1), Lazar, M. (Supervisor 2) & Butler, H. (Supervisor 2)
Student thesis: Master
Adaptive port-Hamiltonian discretization of distributed parameter systems
Author: Meijer, T., 25 Oct 2018Supervisor: Weiland, S. (Supervisor 1) & van den Hurk, D. (Supervisor 2)
Student thesis: Master