Projects per year
Organization profile
Introduction / mission
This Lab focusses on control techniques in lithographic scanners, in particular related to high-accuracy positioning systems.
Organisational profile
A distinction can be made based on motion range (“long” indicating meter-scale, “short” indicating mm scale), and accuracy (micrometer or sub-nanometer). Long-range actuators typically have a moderate accuracy but suffer from nonlinearities like friction, requiring compensation methods using adaptive or learning techniques. Nonlinearities also play a role when using piezo materials for actuation in high-accuracy applications, possibly simultaneously with using the material as sensor (“self-sensing”). Finally, control techniques to improve sub-nanometer positioning systems have to deal with position dependency, in particular in the observation of dynamic modes in the measurement system. This has led to position-dependent observers creating the option of increasing control bandwidth.
Fingerprint
Network
Profiles
-
Clarisse Bosman Barros, MSc
- Department of Electrical Engineering, Control Systems - Doctoral Candidate
- Department of Electrical Engineering, Control of high-precision mechatronic systems
- Department of Electrical Engineering, Machine Learning for Modelling and Control
Person: Prom. : doctoral candidate (PhD)
-
Hans Butler
- Department of Electrical Engineering, Control Systems - Full Professor
- Department of Electrical Engineering, Control of high-precision mechatronic systems
Person: HGL : Professor, HGL : Professor
-
Yanin Kasemsinsup, MSc
- Department of Electrical Engineering, Control of high-precision mechatronic systems
- Department of Electrical Engineering, Control Systems - University Lecturer
Person: Prom. : doctoral candidate (PhD), OWP : University Teacher / Researcher
Projects
-
Advanced piezo-electric water stage
Van den Hof, P. M. J., Bosman Barros, C., Nawijn, H. & van der Hagen, D.
1/01/18 → 31/12/22
Project: Research direct
-
APROCS: Automated Linear Parameter-Varying Modeling and Control Synthesis for Nonlinear Complex Systems
Tóth, R., Tóth, R., Schoukens, M., Bloemers, T. A. H., Koelewijn, P. J. W., Sadeghzadeh, A., Nawijn, H., Iacob, L., Cox, P. B. & van der Hagen, D.
1/09/17 → 31/08/22
Project: Research direct
-
EVERLASTING: Electric Vehicle Enhanced Range, Lifetime And Safety Through INGenious battery management
Hendrix, W. H. A., Weiland, S., Donkers, M. C. F. (., Donkers, M. C. F. (., Padilla Cazar, G. P. (., Nawijn, H. & van der Hagen, D.
1/09/16 → 28/02/21
Project: Research direct
Research Output
-
A Closed-Form Solution to Estimate Spatially Varying Parameters in Heat and Mass Transport
Van Kampen, R. J. R., Das, A., Weiland, S. & Van Berkel, M., Nov 2021, In : IEEE Control Systems Letters. 5, 5, p. 1681-1686 6 p., 9284622.Research output: Contribution to journal › Article › Academic › peer-review
-
Multiphysical modeling and optimal control of material properties for photopolymerization processes
Classens, K. H. J., Hafkamp, T. M., Westbeek, S., Remmers, J. J. C. & Weiland, S., Feb 2021, In : Additive Manufacturing. 38, 13 p., 101520.Research output: Contribution to journal › Article › Academic › peer-review
Open AccessFile -
Active wafer clamp control of wafer heating effects in extreme ultraviolet lithography
van den Hurk, D. P. M., 21 Oct 2020, Eindhoven: Technische Universiteit Eindhoven. 137 p.Research output: Thesis › Phd Thesis 1 (Research TU/e / Graduation TU/e)
Open AccessFile
Press / Media
-
US Patent Issued to ASML Netherlands on Sept. 29 for "Lithographic apparatus and device manufacturing method" (Dutch Inventors)
29/09/20
1 item of Media coverage
Press/Media: Expert Comment
-
US Patent Issued to ASML Netherlands on Aug. 4 for "Projection system and mirror and radiation source for a lithographic apparatus" (Dutch Inventors)
4/08/20
1 item of Media coverage
Press/Media: Expert Comment
-
US Patent Issued to ASML Netherlands on June 9 for "Lithographic apparatus and device manufacturing method" (Dutch Inventors)
10/06/20
1 item of Media coverage
Press/Media: Expert Comment
Student theses
-
Active damping for charge driven piezoelectric nanopositioning stage using self sensing control
Author: Di Filippo, R., 19 Sep 2018Supervisor: Weiland, S. (Supervisor 1), Butler, H. (Supervisor 2), Jansen, B. (External coach) & Vandervelden, R. (External person) (External coach)
Student thesis: Master
-
Adaptive friction compensation for an industrial coreless linear motor setup
Author: van den Boom, P., 13 Dec 2018Supervisor: Nguyen, T. (Supervisor 1), Lazar, M. (Supervisor 2) & Butler, H. (Supervisor 2)
Student thesis: Master
-
Adaptive port-Hamiltonian discretization of distributed parameter systems
Author: Meijer, T., 25 Oct 2018Supervisor: Weiland, S. (Supervisor 1) & van den Hurk, D. (Supervisor 2)
Student thesis: Master