Control of high-precision mechatronic systems

Organization profile

Introduction / mission

This Lab focusses on control techniques in lithographic scanners, in particular related to high-accuracy positioning systems.

Organisational profile

A distinction can be made based on motion range (“long” indicating meter-scale, “short” indicating mm scale), and accuracy (micrometer or sub-nanometer). Long-range actuators typically have a moderate accuracy but suffer from nonlinearities like friction, requiring compensation methods using adaptive or learning techniques. Nonlinearities also play a role when using piezo materials for actuation in high-accuracy applications, possibly simultaneously with using the material as sensor (“self-sensing”). Finally, control techniques to improve sub-nanometer positioning systems have to deal with position dependency, in particular in the observation of dynamic modes in the measurement system. This has led to position-dependent observers creating the option of increasing control bandwidth.

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    Projects

    Research Output

    Automating data-driven modelling of dynamical systems: an evolutionary computation approach

    Khandelwal, D., 4 Mar 2020, Eindhoven: Technische Universiteit Eindhoven. 255 p.

    Research output: ThesisPhd Thesis 1 (Research TU/e / Graduation TU/e)

    Open Access
    File

    Nanometer-accurate motion control of moving-magnet planar motors

    Proimadis, I., 2020, (Accepted/In press) Eindhoven: Technische Universiteit Eindhoven.

    Research output: ThesisPhd Thesis 1 (Research TU/e / Graduation TU/e)

    Active compensation of the deformation of a magnetically levitated mover of a planar motor

    Custers, C., Proimadis, I., Jansen, J. W. H., Butler, H., Toth, R., Lomonova, E. & Van den Hof, P., May 2019, 2019 IEEE International Electric Machines and Drives Conference, IEMDC 2019. Piscataway: Institute of Electrical and Electronics Engineers, p. 854-861 8 p. 8785302

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    Open Access
    File
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    Student theses

    Active damping for charge driven piezoelectric nanopositioning stage using self sensing control

    Author: Di Filippo, R., 19 Sep 2018

    Supervisor: Weiland, S. (Supervisor 1), Butler, H. (Supervisor 2), Jansen, B. (External coach) & Vandervelden, R. (External person) (External coach)

    Student thesis: Master

    Adaptive friction compensation for an industrial coreless linear motor setup

    Author: van den Boom, P., 13 Dec 2018

    Supervisor: Nguyen, T. (Supervisor 1), Lazar, M. (Supervisor 2) & Butler, H. (Supervisor 2)

    Student thesis: Master

    Adaptive port-Hamiltonian discretization of distributed parameter systems

    Author: Meijer, T., 25 Oct 2018

    Supervisor: Weiland, S. (Supervisor 1) & van den Hurk, D. (Supervisor 2)

    Student thesis: Master