Projects per year
Organization profile
Introduction / mission
This Lab focusses on control techniques in lithographic scanners, in particular related to high-accuracy positioning systems.
Organisational profile
A distinction can be made based on motion range (“long” indicating meter-scale, “short” indicating mm scale), and accuracy (micrometer or sub-nanometer). Long-range actuators typically have a moderate accuracy but suffer from nonlinearities like friction, requiring compensation methods using adaptive or learning techniques. Nonlinearities also play a role when using piezo materials for actuation in high-accuracy applications, possibly simultaneously with using the material as sensor (“self-sensing”). Finally, control techniques to improve sub-nanometer positioning systems have to deal with position dependency, in particular in the observation of dynamic modes in the measurement system. This has led to position-dependent observers creating the option of increasing control bandwidth.
Fingerprint Dive into the research topics where Control of high-precision mechatronic systems is active. These topic labels come from the works of this organisation's members. Together they form a unique fingerprint.
Network
Recent external collaboration on country level. Dive into details by clicking on the dots.
Profiles
Clarisse Bosman Barros, MSc
- Department of Electrical Engineering, Control Systems - Doctoral Candidate
- Department of Electrical Engineering, Control of high-precision mechatronic systems
- Department of Electrical Engineering, Machine Learning for Modelling and Control
Person: Prom. : doctoral candidate (PhD)
Hans Butler
- Department of Electrical Engineering, Control Systems - Full Professor
- Department of Electrical Engineering, Control of high-precision mechatronic systems
Person: HGL : Professor
Yanin Kasemsinsup, MSc
- Department of Electrical Engineering, Control Systems - Former Doctoral Candidate
- Department of Electrical Engineering, Control of high-precision mechatronic systems
Person: Prom. : doctoral candidate (PhD), Unknown
Projects
Advanced piezo-electric water stage
Van den Hof, P. M. J., Bosman Barros, C. & Nawijn, H.
1/01/18 → 31/12/22
Project: Research direct
APROCS: Automated Linear Parameter-Varying Modeling and Control Synthesis for Nonlinear Complex Systems
Toth, R., Toth, R., Schoukens, M., Cox, P. B., Bloemers, T. A. H., Koelewijn, P. J. W., Sadeghzadeh, A., Nawijn, H. & Iacob, L.
1/09/17 → 31/08/22
Project: Research direct
EVERLASTING: Electric Vehicle Enhanced Range, Lifetime And Safety Through INGenious battery management
Hendrix, W. H. A., Weiland, S., Donkers, M. C. F. (., Donkers, M. C. F. (., Padilla, G. P. (. & Nawijn, H.
1/09/16 → 31/08/20
Project: Research direct
Research Output
Automating data-driven modelling of dynamical systems: an evolutionary computation approach
Khandelwal, D., 4 Mar 2020, Eindhoven: Technische Universiteit Eindhoven. 255 p.Research output: Thesis › Phd Thesis 1 (Research TU/e / Graduation TU/e)
Open Access
File
Nanometer-accurate motion control of moving-magnet planar motors
Proimadis, I., 2020, (Accepted/In press) Eindhoven: Technische Universiteit Eindhoven.Research output: Thesis › Phd Thesis 1 (Research TU/e / Graduation TU/e)
Active compensation of the deformation of a magnetically levitated mover of a planar motor
Custers, C., Proimadis, I., Jansen, J. W. H., Butler, H., Toth, R., Lomonova, E. & Van den Hof, P., May 2019, 2019 IEEE International Electric Machines and Drives Conference, IEMDC 2019. Piscataway: Institute of Electrical and Electronics Engineers, p. 854-861 8 p. 8785302Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review
Open Access
File
Press / Media
US Patent Issued to ASML Netherlands on Feb. 25 for "Lithographic apparatus" (Dutch Inventors)
26/02/20
1 item of Media coverage
Press/Media: Expert Comment
US Patent Issued to ASML Netherlands on Feb. 4 for "Lithography apparatus and device manufacturing method" (Dutch Inventors)
4/02/20
1 item of Media coverage
Press/Media: Expert Comment
WIPO PUBLISHES PATENT OF ASML NETHERLANDS FOR "METROLOGY APPARATUS" (DUTCH INVENTORS)
27/12/19
1 item of Media coverage
Press/Media: Expert Comment
Student theses
Active damping for charge driven piezoelectric nanopositioning stage using self sensing control
Author: Di Filippo, R., 19 Sep 2018Supervisor: Weiland, S. (Supervisor 1), Butler, H. (Supervisor 2), Jansen, B. (External coach) & Vandervelden, R. (External person) (External coach)
Student thesis: Master
Adaptive friction compensation for an industrial coreless linear motor setup
Author: van den Boom, P., 13 Dec 2018Supervisor: Nguyen, T. (Supervisor 1), Lazar, M. (Supervisor 2) & Butler, H. (Supervisor 2)
Student thesis: Master
Adaptive port-Hamiltonian discretization of distributed parameter systems
Author: Meijer, T., 25 Oct 2018Supervisor: Weiland, S. (Supervisor 1) & van den Hurk, D. (Supervisor 2)
Student thesis: Master