Projects per year
Organisation profile
Introduction / mission
This Lab focusses on control techniques in lithographic scanners, in particular related to high-accuracy positioning systems.
Organisation profile
A distinction can be made based on motion range (“long” indicating meter-scale, “short” indicating mm scale), and accuracy (micrometer or sub-nanometer). Long-range actuators typically have a moderate accuracy but suffer from nonlinearities like friction, requiring compensation methods using adaptive or learning techniques. Nonlinearities also play a role when using piezo materials for actuation in high-accuracy applications, possibly simultaneously with using the material as sensor (“self-sensing”). Finally, control techniques to improve sub-nanometer positioning systems have to deal with position dependency, in particular in the observation of dynamic modes in the measurement system. This has led to position-dependent observers creating the option of increasing control bandwidth.
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Collaborations and top research areas from the last five years
Profiles
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Clarisse Bosman Barros, MSc
- Electrical Engineering, Control of high-precision mechatronic systems
- Electrical Engineering, Machine Learning for Modelling and Control
- Electrical Engineering, Control Systems - Doctoral Candidate
Person: Prom. : doctoral candidate (PhD), Prom. : doctoral candidate (PhD)
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Hans Butler
- Electrical Engineering, Control Systems - Full Professor
- Electrical Engineering, Control of high-precision mechatronic systems
Person: HGL : Professor
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Roland Tóth
- Electrical Engineering, Control Systems - Full Professor
- EAISI High Tech Systems - Full Professor
- Electrical Engineering, Control of high-precision mechatronic systems
- Electrical Engineering, Machine Learning for Modelling and Control
- Electrical Engineering, Autonomous Motion Control Lab
Person: HGL : Professor, UHD : Associate Professor
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Advanced piezo-electric water stage
Nawijn, H. (Project communication officer), van der Hagen, D. (Project communication officer), Tóth, R. (Project Manager), Van den Hof, P. M. J. (Project member), Bosman Barros, C. (Project member) & Butler, H. (Project member)
1/01/18 → 30/11/25
Project: Third tier
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APROCS: Automated Linear Parameter-Varying Modeling and Control Synthesis for Nonlinear Complex Systems
Tóth, R. (Project Manager), Tóth, R. (Project member), Schoukens, M. (Project member), Bloemers, T. A. H. (Project member), Koelewijn, P. J. W. (Project member), Nawijn, H. (Project communication officer), Iacob, L. C. (Project member) & van der Hagen, D. (Project communication officer)
1/09/17 → 31/03/23
Project: Research direct
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IMPERIUM: Implementation of powertrain control for economic, low real driving emissions and fuel consumption
Hendrix, W. H. A. (Project member), Lazar, M. (Project Manager), Nawijn, H. (Project communication officer) & van der Hagen, D. (Project communication officer)
1/09/16 → 31/08/19
Project: Research direct
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Attitude Takeover Control for Noncooperative Space Targets Based on Gaussian Processes with Online Model Learning
Liu, Y., Wang, P. (Corresponding author), Lee, C.-H. & Tóth, R., 1 Jun 2024, In: IEEE Transactions on Aerospace and Electronic Systems. 60, 3, p. 3050-3066 17 p., 10420444.Research output: Contribution to journal › Article › Academic › peer-review
Open AccessFile3 Citations (Scopus)28 Downloads (Pure) -
Backflipping With Miniature Quadcopters by Gaussian-Process-Based Control and Planning
Antal, P. (Corresponding author), Péni, T. & Tóth, R., 1 Jan 2024, In: IEEE Transactions on Control Systems Technology. 32, 1, p. 3-14 12 p., 10209364.Research output: Contribution to journal › Article › Academic › peer-review
Open AccessFile3 Citations (Scopus)80 Downloads (Pure) -
Concept Design and Analysis of a Linear Axis System for Lithography Machines: Towards Increased Wafer Throughput
Kuncolienkar, A., 1 Oct 2024, Eindhoven: Technische Universiteit Eindhoven. 92 p.Research output: Thesis › EngD Thesis
Datasets
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A Global Optimal Solution to the Eco-Driving Problem
Padilla Cazar, G. P. (Creator), Weiland, S. (Creator) & Donkers, M. C. F. (Creator), Technische Universiteit Eindhoven, 14 Jun 2018
DOI: 10.4121/uuid:9e24298e-6f39-4e6f-8ef0-f8d6effa029d, https://data.4tu.nl/articles/_/12708830/1
Dataset
Prizes
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Best Student Paper Award IFAC CAO 2022
Bolderman, M. (Recipient), Fan, D. (Recipient), Lazar, M. (Recipient) & Butler, H. (Recipient), 2022
Prize: Other › Career, activity or publication related prizes (lifetime, best paper, poster etc.) › Scientific
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Journal of Process Control Paper Prize Award 2020-Survey Category
Saltik, M. B. (Recipient), Özkan, L. (Recipient), Ludlage, J. H. A. (Recipient), Weiland, S. (Recipient) & Van den Hof, P. M. J. (Recipient), 2020
Prize: Other › Career, activity or publication related prizes (lifetime, best paper, poster etc.) › Scientific
Press/Media
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Advancing control engineering methods to meet current and future challenges
16/02/23
1 item of Media coverage
Press/Media: Expert Comment
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Eindhoven University of Technology: Helping Non-Experts Create Mathematical Models Through Natural Selection
5/03/20
1 item of Media coverage
Press/Media: Expert Comment
Student theses
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A Control Lyapunov and Barrier function approach to safe stabilization of nonlinear systems with application to cancer treatment
van Gemert, J. J. H. (Author), Lazar, M. (Supervisor 1) & Weiland, S. (Supervisor 2), 7 Dec 2023Student thesis: Master
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Active damping for charge driven piezoelectric nanopositioning stage using self sensing control
Di Filippo, R. (Author), Weiland, S. (Supervisor 1), Butler, H. (Supervisor 2), Jansen, B. (External coach) & Vandervelden, R. (External coach), 19 Sept 2018Student thesis: Master
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Adaptive friction compensation for an industrial coreless linear motor setup
van den Boom, P. W. M. (Author), Nguyen, T. (Supervisor 1), Lazar, M. (Supervisor 2) & Butler, H. (Supervisor 2), 13 Dec 2018Student thesis: Master