Projects per year
Organization profile
Introduction / mission
This Lab focusses on control techniques in lithographic scanners, in particular related to high-accuracy positioning systems.
Organisational profile
A distinction can be made based on motion range (“long” indicating meter-scale, “short” indicating mm scale), and accuracy (micrometer or sub-nanometer). Long-range actuators typically have a moderate accuracy but suffer from nonlinearities like friction, requiring compensation methods using adaptive or learning techniques. Nonlinearities also play a role when using piezo materials for actuation in high-accuracy applications, possibly simultaneously with using the material as sensor (“self-sensing”). Finally, control techniques to improve sub-nanometer positioning systems have to deal with position dependency, in particular in the observation of dynamic modes in the measurement system. This has led to position-dependent observers creating the option of increasing control bandwidth.
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Profiles
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Clarisse Bosman Barros, MSc
- Electrical Engineering, Control of high-precision mechatronic systems
- Electrical Engineering, Machine Learning for Modelling and Control
- Electrical Engineering, Control Systems - Doctoral Candidate
Person: Prom. : doctoral candidate (PhD), Prom. : doctoral candidate (PhD)
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Hans Butler
- Electrical Engineering, Control Systems - Full Professor
- Electrical Engineering, Control of high-precision mechatronic systems
Person: HGL : Professor
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Roland Tóth
- Electrical Engineering, Control of high-precision mechatronic systems
- Electrical Engineering, Machine Learning for Modelling and Control
- Electrical Engineering, Autonomous Motion Control Lab
- Electrical Engineering, Control Systems - Associate Professor
- EAISI High Tech Systems - Associate Professor
Person: UHD : Associate Professor
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AquaConnect, key technologies for safeguarding regional water provision in fresh water stressed deltas
Goswami, D., Voeten, J. P. M., Verheijen, P. C. N., Lazar, M., de Mol-Regels, M. & van der Hagen, D.
15/09/21 → 31/08/25
Project: Research direct
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Advanced piezo-electric water stage
Van den Hof, P. M. J., Bosman Barros, C., Nawijn, H., van der Hagen, D. & Tóth, R.
1/01/18 → 30/11/25
Project: Research direct
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APROCS: Automated Linear Parameter-Varying Modeling and Control Synthesis for Nonlinear Complex Systems
Tóth, R., Tóth, R., Schoukens, M., Bloemers, T. A. H., Koelewijn, P. J. W., Nawijn, H., Iacob, L. C. & van der Hagen, D.
1/09/17 → 31/03/23
Project: Research direct
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Advancing Process Control using Orthonormal Basis Functions
Bachnas, A. A., 16 Feb 2023, (Accepted/In press) Eindhoven: Eindhoven University of Technology.Research output: Thesis › Phd Thesis 1 (Research TU/e / Graduation TU/e)
Open AccessFile -
Analysis and Control of Nonlinear Systems with Stability and Performance Guarantees: A Linear Parameter-Varying Approach
Koelewijn, P. J. W., 15 Feb 2023, (Accepted/In press) Eindhoven: Eindhoven University of Technology. 373 p.Research output: Thesis › Phd Thesis 1 (Research TU/e / Graduation TU/e)
Open AccessFile -
Physics–Guided Neural Networks for Feedforward Control: From Consistent Identification to Feedforward Controller Design
Bolderman, M., Lazar, M. & Butler, H., 10 Jan 2023, 2022 IEEE 61st Conference on Decision and Control, CDC 2022. Institute of Electrical and Electronics Engineers, p. 1497-1502 6 p. 9992852Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review
Prizes
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Best Student Paper Award IFAC CAO 2022
Bolderman, Max (Recipient), Fan, Daiwei (Recipient), Lazar, Mircea (Recipient) & Butler, Hans (Recipient), 2022
Prize: Other › Career, activity or publication related prizes (lifetime, best paper, poster etc.) › Scientific
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Journal of Process Control Paper Prize Award 2020-Survey Category
Saltik, M.B. (Bahadir) (Recipient), Özkan, Leyla (Recipient), Ludlage, Jobert H.A. (Recipient), Weiland, Siep (Recipient) & Van den Hof, Paul M.J. (Recipient), 2020
Prize: Other › Career, activity or publication related prizes (lifetime, best paper, poster etc.) › Scientific
Press / Media
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US Patent Issued to ASML Netherlands on Jan. 24 for "Electronic system, accelerometer, calibration method, lithographic apparatus and device manufacturing method" (Dutch Inventors)
25/01/23
1 item of Media coverage
Press/Media: Expert Comment
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US Patent Issued to ASML Netherlands on Jan. 3 for "Lithographic apparatus and method" (Dutch Inventor)
21/01/23
1 item of Media coverage
Press/Media: Expert Comment
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US Patent Issued to ASML Netherlands on Oct. 11 for "Height sensor, lithographic apparatus and method for manufacturing devices" (Dutch Inventors)
12/10/22
1 item of Media coverage
Press/Media: Expert Comment
Student theses
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Active damping for charge driven piezoelectric nanopositioning stage using self sensing control
Author: Di Filippo, R., 19 Sep 2018Supervisor: Weiland, S. (Supervisor 1), Butler, H. (Supervisor 2), Jansen, B. (External coach) & Vandervelden, R. (External person) (External coach)
Student thesis: Master
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Adaptive friction compensation for an industrial coreless linear motor setup
Author: van den Boom, P. W. M., 13 Dec 2018Supervisor: Nguyen, T. (Supervisor 1), Lazar, M. (Supervisor 2) & Butler, H. (Supervisor 2)
Student thesis: Master
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Adaptive port-Hamiltonian discretization of distributed parameter systems
Author: Meijer, T., 25 Oct 2018Supervisor: Weiland, S. (Supervisor 1) & van den Hurk, D. (Supervisor 2)
Student thesis: Master