Control of high-precision mechatronic systems

  • Address

    Flux, Groene Loper 19

    5612 AP Eindhoven

    Netherlands

  • Postal address

    Department of Electrical Engineering, P.O. Box 513

    5600 MB Eindhoven

    Netherlands

Organization profile

Introduction / mission

This Lab focusses on control techniques in lithographic scanners, in particular related to high-accuracy positioning systems.

Organisational profile

A distinction can be made based on motion range (“long” indicating meter-scale, “short” indicating mm scale), and accuracy (micrometer or sub-nanometer). Long-range actuators typically have a moderate accuracy but suffer from nonlinearities like friction, requiring compensation methods using adaptive or learning techniques. Nonlinearities also play a role when using piezo materials for actuation in high-accuracy applications, possibly simultaneously with using the material as sensor (“self-sensing”). Finally, control techniques to improve sub-nanometer positioning systems have to deal with position dependency, in particular in the observation of dynamic modes in the measurement system. This has led to position-dependent observers creating the option of increasing control bandwidth.

UN Sustainable Development Goals

In 2015, UN member states agreed to 17 global Sustainable Development Goals (SDGs) to end poverty, protect the planet and ensure prosperity for all. Our work contributes towards the following SDG(s):

  • SDG 3 - Good Health and Well-being
  • SDG 7 - Affordable and Clean Energy
  • SDG 9 - Industry, Innovation, and Infrastructure
  • SDG 13 - Climate Action

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