Projects per year
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Finished
TKI 2019 Hard-X-Ray source for Wafer Metrology
Mutsaers, P. H. A. (Project Manager), Luiten, O. J. (Project member), van den Berg, R. G. W. (Project member), van Elk, I. J. M. (Project member), Stragier, X. F. D. (Project member), Sweers, C. W. (Project member), Oosterink, S. (Project member) & de Vos, T. D. C. (Project member)
1/01/20 → 10/12/24
Project: Third tier
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Coherent inverse Compton EUV source
Luiten, O. J. (Project Manager) & Schaap, B. H. (Project member)
1/01/19 → 13/07/22
Project: Research direct