Atomic scale processing

Activities

Activities per year 2004 2007 2009 2022 2022

• 18 Contributed talk
• 8 Invited talk
• 4 Conference
• 1 Workshop, seminar, course or exhibition
• 3 More
  • 1 Editorial activity
  • 1 Membership of board
  • 1 Keynote talk

Activities per year

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• POx/Al2O3 stacks for surface passivation of Si and InP

  Theeuwes, R. J. (Speaker)

  10 May 2022

  Activity: Talk or presentation types › Contributed talk › Scientific

• Excellent Surface Passivation of n+-doped Silicon by POx/Al2O3 Stacks with High Positive Fixed Charge Density

  Theeuwes, R. J. (Speaker)

  9 May 2022

  Activity: Talk or presentation types › Contributed talk › Scientific

• 2022 MRS Spring Meeting & Exhibit, May 8-13, 2022, Honolulu, Hawai'i, May 23-25, 2022, Virtual

  Theeuwes, R. J. (Participant)

  8 May 2022 → 13 May 2022

  Activity: Participating in or organising an event types › Conference › Scientific

• Excellent Surface Passivation of Textured n+-doped Silicon by POx/Al203 Stacks

  Theeuwes, R. J. (Speaker)

  28 Mar 2022

  Activity: Talk or presentation types › Contributed talk › Scientific

• 12th International Conference on Crystalline Silicon Photvoltaics 2022

  Theeuwes, R. J. (Participant)

  28 Mar 2022 → 30 Mar 2022

  Activity: Participating in or organising an event types › Conference › Scientific

• Plasma-assisted atomic layer deposition: from basics to applications

  Kessels, W. M. M. (Speaker)

  10 Feb 2021

  Activity: Talk or presentation types › Keynote talk › Scientific

• SALD (External organisation)

  Kessels, W. M. M. (Chair)

  17 Sept 2020 → 31 Dec 2023

  Activity: Membership types › Membership of board › Professional

• ALD/ALE 2020 Virtual Meeting

  Theeuwes, R. (Participant)

  29 Jun 2020 → 1 Jul 2020

  Activity: Participating in or organising an event types › Conference › Scientific

• ALD Academy

  Theeuwes, R. (Participant)

  14 Jan 2020 → 15 Jan 2020

  Activity: Participating in or organising an event types › Workshop, seminar, course or exhibition › Scientific

• Phosphorus oxide / aluminum oxide stacks: a highly promising passivation scheme for n-type Si regions in solar cells

  Theeuwes, R. (Member)

  11 Sept 2019

  Activity: Talk or presentation types › Contributed talk › Scientific

• SiliconPV 2019: 9th International Conference on Crystalline Silicon Photovoltaics

  Theeuwes, R. (Participant)

  8 Apr 2019 → 11 Apr 2019

  Activity: Participating in or organising an event types › Conference › Scientific

• New Process Concepts Towards Area-Selective Atomic Layer Deposition and Atomic Layer Etching of Zinc Oxide

  Mameli, A. (Member), Verheijen, M. A. (Member), Karasulu, B. (Member), Mackus, A. J. M. (Member), Kessels, W. M. M. (Member) & Roozeboom, F. (Speaker)

  30 Sept 2018 → 4 Oct 2018

  Activity: Talk or presentation types › Contributed talk › Scientific

• Atomic Layer Etching of ZnO on 2D and 3D substrates, using acetylacetone and O2 plasma

  Mameli, A. (Member), Verheijen, M. A. (Member), Karasulu, B. (Member), Mackus, A. J. M. (Member), Kessels, W. M. M. (Member) & Roozeboom, F. (Invited speaker)

  24 Jul 2018 → 28 Jul 2018

  Activity: Talk or presentation types › Invited talk › Scientific

• Journal of Vacuum Science and Technology A (Journal)

  Kessels, W. M. M. (Editorial board member)

  2015 → …

  Activity: Publication peer-review and editorial work types › Editorial activity › Scientific

• Applied Materials, Santa Clara, CA, USA

  Kessels, W. M. M. (Invited speaker)

  1 Jul 2010

  Activity: Talk or presentation types › Invited talk › Scientific

• LG Electronics, Seoul, Korea

  Kessels, W. M. M. (Invited speaker)

  1 Apr 2010

  Activity: Talk or presentation types › Invited talk › Scientific

• Samsung Electronics, Yongin-City, Korea

  Kessels, W. M. M. (Invited speaker)

  1 Apr 2010

  Activity: Talk or presentation types › Invited talk › Scientific

• Thin Film Nanomanufacturing Conference, Veldhoven, the Netherlands

  Kessels, W. M. M. (Speaker)

  25 Nov 2009

  Activity: Talk or presentation types › Contributed talk › Scientific

• Netherlands MicroNanoConference '09, November 5-6, 2009, Delft, the Netherlands

  Kessels, W. M. M. (Speaker)

  1 Nov 2009

  Activity: Talk or presentation types › Contributed talk › Scientific

• Workshop on Silicon Dry Processing for Nanoelectronics and Micromechanics, Eindhoven, the Netherlands

  Kessels, W. M. M. (Speaker)

  27 Aug 2009

  Activity: Talk or presentation types › Contributed talk › Scientific

• 9th International Conference on Atomic Layer Deposition (ALD 2009), Monterey, USA

  Kessels, W. M. M. (Invited speaker)

  20 Jul 2009

  Activity: Talk or presentation types › Invited talk › Scientific

• 29th International Conference on Phenomena in Ionized Gases (ICPIG 2009), July 12-17, 2009, Cancún, México

  Kessels, W. M. M. (Speaker)

  12 Jul 2009

  Activity: Talk or presentation types › Contributed talk › Scientific

• Opening with respect to ALD tool, Holst Centre, Eindhoven, the Netherlands

  Kessels, W. M. M. (Speaker)

  18 Jun 2009

  Activity: Talk or presentation types › Contributed talk › Scientific

• Gordon Research Conference "Chemical Reactions at Surfaces", February 8-13, 2009, Ventura, CA, USA

  Kessels, W. M. M. (Speaker)

  1 Feb 2009

  Activity: Talk or presentation types › Contributed talk › Scientific

• 30th International Conference on Dry Process, Tokyo, Japan

  Kessels, W. M. M. (Speaker)

  1 Nov 2008

  Activity: Talk or presentation types › Contributed talk › Scientific

• 5th International Conference on Hot-Wire Chemical Vapor Deposition (HWCVD 5), August 20-24, 2008, Cambridge, MA, USA

  Kessels, W. M. M. (Invited speaker)

  1 Aug 2008

  Activity: Talk or presentation types › Invited talk › Scientific

• 54th International Symposium American Vacuum Society (Peter Mark Memorial Award honorary lectureship)

  Kessels, W. M. M. (Invited speaker)

  14 Oct 2007

  Activity: Talk or presentation types › Invited talk › Scientific

• 22nd International Conference on Amorphous and Nanocrystalline Semiconductors, Breckenridge, USA

  Kessels, W. M. M. (Speaker)

  30 Sept 2007

  Activity: Talk or presentation types › Contributed talk › Scientific

• European Materials Research Society, Fall Meeting, Warsaw, Poland

  Kessels, W. M. M. (Invited speaker)

  1 Sept 2007

  Activity: Talk or presentation types › Invited talk › Scientific

• 16th International Colloquium on Plasma Processes, Toulouse, France

  Kessels, W. M. M. (Speaker)

  7 Jun 2007

  Activity: Talk or presentation types › Contributed talk › Scientific

• 2007 Meeting of the Dutch Vacuum Society (NEVAC), May 1, 2007, Eindhoven, The Netherlands

  Kessels, W. M. M. (Speaker)

  1 May 2007

  Activity: Talk or presentation types › Contributed talk › Scientific

• Department of Chemical Engineering, Colorado School of Mines, April 1, 2007, Golden, CO, USA

  Kessels, W. M. M. (Speaker)

  1 Apr 2007

  Activity: Talk or presentation types › Contributed talk › Scientific

• IMEC, February 1, 2007, Leuven, Belgium

  Kessels, W. M. M. (Speaker)

  1 Feb 2007

  Activity: Talk or presentation types › Contributed talk › Scientific

• European Materials Research Society, Spring Meeting, Strasbourg, France

  Kessels, W. M. M. (Speaker)

  1 May 2004

  Activity: Talk or presentation types › Contributed talk › Scientific