Thermal CVD

  • J.J.M. Sanders (Manager)

Facility/equipment: Equipment

    Equipments Details


    In thermal CVD, energy in the form of heat is supplied to activate the required gas and gas-solid phase reactions. In all thermal CVD processes the reactant gases are delivered to a reactor. An oven or hot lamps typically supply the thermal energy. By-products are removed by the gas flow or by a pumping unit. At PMP we have both atmospheric and low pressure thermal CVD set-ups. These set-ups are used to synthesize for example carbon nanotubes and graphene.
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