The RF-PECVD installation comprises a Load Lock and two Process Chambers. The Process Chambers are loaded by the Load Lock using a magnetic rod. The Process Chambers can be batch-processed independent of each other. The plasma is generated by an RF source. The aim of this experiment is to optimize at lab scale the manufacturing process and efficiency of solar cells. To this end the installation has various analysis ports and set-up options to monitor and optimize the process.
|Name||Plasma Deposition Solar Cells|
|Manufacturers||Equipment & Prototype Center|