Plasma Deposition Solar Cells

    Facility/equipment: Equipment

    • Location

      Netherlands

    Equipments Details

    Description

    The RF-PECVD installation comprises a Load Lock and two Process Chambers. The Process Chambers are loaded by the Load Lock using a magnetic rod. The Process Chambers can be batch-processed independent of each other. The plasma is generated by an RF source. The aim of this experiment is to optimize at lab scale the manufacturing process and efficiency of solar cells. To this end the installation has various analysis ports and set-up options to monitor and optimize the process.

    Details

    NamePlasma Deposition Solar Cells
    ManufacturersEquipment & Prototype Center

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