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Plasma and Materials Processing (PMP labs)
W.M.M. Kessels
(Manager)
Plasma & Materials Processing
Facility/equipment
:
Research lab
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Netherlands
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Contact information
Name
W.M.M. (Erwin) Kessels
Equipment hierarchy
Plasma and Materials Processing (PMP labs)
ALD
Chemical Vapor Deposition
Ellipsometric porosimetry
ETP Reactors
Expanding Thermal Plasma
Femto-second laser system
Hot-Wire CVD
iCVD
Oxford Instruments FlexAL 1
Oxford Instruments FlexAL 2
Oxford Instruments OpAL
Plasma-Enhanced Chemical Vapor Deposition (PECVD) reactors
Plasma-enhanced CVD
Thermal CVD
Thermal CVD
Transmission electron microscope