Oxford Polymer RIE

    Stacey Martina (Manager)
NanoLab@TU/e

Facility/equipment: Equipment

    Equipments Details

    Description

    Reactive Ion Etching reactor for etching Polymer based materials like: Photo Resist, Polyimide and BCB using timed etch steps without endpoint detection.

    Contact information

    Name

    Equipment hierarchy

    NanoLab@TU/e
    Oxford Polymer RIE

    Terms of loan/booking

    Equipment: available for loan/booking - internal and external

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