Oxford Polymer RIE

  • Stacey Martina (Manager)

Facility/equipment: Equipment

    Equipments Details


    Reactive Ion Etching reactor for etching Polymer based materials like: Photo Resist, Polyimide and BCB using timed etch steps without endpoint detection.
    Photo associated with equipment - csm_sized_Polymer_RIE_1D057291_208e4a2266.jpg


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