Oxford Instruments FlexAL 2D

  • Barathi Krishnamoorthy (Manager)

Facility/equipment: Equipment

    Equipments Details


    Atomic layer deposition (ALD) reactor, both plasma assisted and thermal. Equipped with a loadlock and six precursors-inputs.
    Photo associated with equipment - csm_sized_ALD_FlexAL2D_NH20170202_133741_8bbcee74d6.jpg


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