Oxford Instruments FlexAL 2D

    Barathi Krishnamoorthy (Manager)
NanoLab@TU/e

Facility/equipment: Equipment

    Equipments Details

    Description

    Atomic layer deposition (ALD) reactor, both plasma assisted and thermal. Equipped with a loadlock and six precursors-inputs.

    Contact information

    Name

    Equipment hierarchy

    NanoLab@TU/e
    Oxford Instruments FlexAL 2D

    Terms of loan/booking

    Equipment: available for loan/booking - internal and external

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