Oxford INstruments FlexAL 2

  • Barathi Krishnamoorthy (Manager)
NanoLab@TU/e

Facility/equipment: Equipment

    Equipments Details

    Description

    Atomic layer deposition (ALD) reactor, both plasma assisted and thermal. Equipped with a loadlock and six precursors-inputs.

    Contact information

    Equipment hierarchy

    NanoLab@TU/e
    Oxford INstruments FlexAL 2

    Terms of loan/booking

    Equipment: available for loan/booking - internal and external