Oxford Instruments FlexAL 1

  • Barathi Krishnamoorthy (Manager)

Facility/equipment: Equipment

    Equipments Details

    Description

    Atomic layer deposition (ALD) reactor, both plasma assisted and thermal. Equipped with a loadlock and four precursors-inputs.
    Photo associated with equipment - csm_sized_ALD_FlexAL1_1D057292_71be5bf153.jpg

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