MOVPE Aixtron Showerhead

  • P.J. (RenĂ©) van Veldhoven (Manager)
NanoLab@TU/e

Facility/equipment: Equipment

    Details

    Description

    Metal Organic Vapour Phase Epitaxy (MOVPE) reactor to grow epitaxial layers with the components In, Ga, As, P, and the doping materials Zn, Si, and Fe on InP wafers.

    Contact information

    Equipment hierarchy

    NanoLab@TU/e
    MOVPE Aixtron Showerhead

    Terms of loan/booking

    Equipment: available for loan/booking - internal and external

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