MOVPE Aixtron Showerhead

    P.J. (René) van Veldhoven (Manager)

Facility/equipment: Equipment

    Equipments Details

    Description

    Metal Organic Vapour Phase Epitaxy (MOVPE) reactor to grow epitaxial layers with the components In, Ga, As, P, and the doping materials Zn, Si, and Fe on InP wafers.
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