MOVPE Aixtron Multiwafer

  • P.J. (RenĂ©) van Veldhoven (Manager)
NanoLab@TU/e

Facility/equipment: Equipment

    Details

    Description

    Growth of InP and GaAs based matrial

    Contact information

    Equipment hierarchy

    NanoLab@TU/e
    MOVPE Aixtron Multiwafer