Initiated chemical vapor deposition (i-CVD) setup. The filament wires (grid) allows for the homolytic cleavage of the initiator molecules. The subsequent polymerization of the monomer from activated radicals occurs at the sample surface. The setup can also serve as a parallel plate rf-driven PECVD chamber: in this case, the grid is transferred into the side arm of the reactor. Presently, an organosilicon-silicon dioxide chemistry is being investigated.