Hot-Wire CVD

  • J.J.M. Sanders (Manager)

Facility/equipment: Equipment

    Equipments Details


    Also known as catalytic CVD (Cat-CVD), this process adopts a hot filament/grid to chemically decompose the precursor molecules. The grid temperature and substrate temperature are independently controlled, allowing low temperatures at the substrate for better adsorption rates at the substrate as well as compatibility with thermally sensitive substrates (e.g. polymers) and higher temperatures at the grid for enhanced precursor decomposition.


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