ASML Pass 5500/1100B scanner

  • Stacey Martina (Manager)
NanoLab@TU/e

Facility/equipment: Equipment

    Details

    Description

    PAS (Philips Automated Stepper)

    Contact information

    Equipment hierarchy

    NanoLab@TU/e
    ASML Pass 5500/1100B scanner

    Terms of loan/booking

    Equipment: available for loan/booking - internal and external