AFM Nanostage 3D

Facility/equipment: Equipment

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Equipments Details


The Nanostage 3D translation stage is part of a metrological Atomic Force Microscope (AFM) with a large measurement volume. The stage contains elastic parallel guidances and three Lorentz actuators to move the sample. The AFM head itself remains stationary. Stiffness and weight compensation mechanisms minimize the generation of heat in the actuators. The sample displacements are measured by three in-house designed differential interferometers.
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NameAFM Nanostage 3D
ManufacturersEquipment & Prototype Center

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  • Research Output

    • 1 Phd Thesis 1 (Research TU/e / Graduation TU/e)

    A 3D translation stage for metrological AFM

    Werner, C., 2010, Eindhoven: Technische Universiteit Eindhoven. 189 p.

    Research output: ThesisPhd Thesis 1 (Research TU/e / Graduation TU/e)

    Open Access
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