Content available in repository
Content available in repository
Description
Details on the method employed to determine film thickness from XPS measurements; the cluster models used for the IR peak assignment by DFT calculations; images showing the δNH2 vibration for aniline adsorbed in the horizontal and vertical configuration; N content on the Ru non-growth area after aniline adsorption at various temperatures measured by XPS.
| Date made available | 22 May 2024 |
|---|---|
| Publisher | AIP Publishing |
Research output
- 1 Article
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In situ formation of inhibitor species through catalytic surface reactions during area-selective atomic layer deposition of TaN
Merkx, M. J. M., Tezsevin, I., Yu, P., Janssen, T., Heinemans, R. H. G. M., Lengers, R. J., Chen, J. R., Jezewski, C. J., Clendenning, S. B., Kessels, W. M. M., Sandoval, T. E. (Corresponding author) & Mackus, A. J. M. (Corresponding author), 28 May 2024, In: Journal of Chemical Physics. 160, 20, 9 p., 204701.Research output: Contribution to journal › Article › Academic › peer-review
Open AccessFile18 Downloads (Pure)