This data set contains the source data of the publication: Wang T, ul Islam T, Steur E, Homan T, Aggarwal I, Onck PR, den Toonder JM, Wang Y. Programmable metachronal motion of closely packed magnetic artificial cilia. Lab on a Chip. 2024. https://doi.org/10.1039/d3lc00956d. In this study, using an in-house developed precise micro-molding technique, we have fabricated closely packed magnetic artificial cilia that can generate well-controlled metachronal waves. The data are obtained with methods described in the publication.