This data set contains the source data of the publication: Venkataramanachar, B.B., Li, J., Islam, T.U., Wang, Y. and den Toonder, J.M.J, 2023. Nanomagnetic Elastomers for Realizing Highly Responsive Micro-and Nanosystems. Nano Letters, 23(20), pp.9203-9211.https://doi.org/10.1021/acs.nanolett.3c00819. In this study, a material preparation process is reported that yields a library of nanomagnetic elastomers with high magnetic particle concentrations suitable for fabricating highly compliant submicron magnetic structures. The data are experimentally obtained with methods described in the publication.