Data underlying the publication: Computational Investigation of Precursor Blocking during Area-Selective Atomic Layer Deposition Using Aniline as a Small-Molecule Inhibitor

I. Tezsevin (Creator)
Joost F.W. Maas (Contributor)
Marc J.M. Merkx (Creator)
Rik J. Lengers (Creator)
W.M.M. (Erwin) Kessels (Creator)
Tania E. Sandoval (Creator)
Adrie J.M. Mackus (Creator)

Dataset

1 Article

1 results

2023
Computational investigation of precursor blocking during area-selective atomic layer deposition using aniline as a small molecule inhibitor
Tezsevin, I., Maas, J. F. W., Merkx, M. J. M., Lengers, R., Kessels, W. M. M., Sandoval, T. E. & Mackus, A. J. M. (Corresponding author), 28 Mar 2023, In: Langmuir. 39, 12, p. 4265-4273 9 p.
Research output: Contribution to journal › Article › Academic › peer-review

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