Data underlying the publication: Blocking mechanisms in area-selective ALD by small molecule inhibitors of different sizes: Steric shielding versus chemical passivation

The publication is focused on unravelling the contributions of two important factors to the blocking performance of small molecule inhibitors: steric shielding and chemical passivation, which was explored both experimentally and theoretically. The dataset contains the raw data, inputs and outputs files for simulations, images and tables for the manuscript.