Plasma processing has been an essential ingredient for scaling down electronics in the past decades, and it can be said that without plasma etching we wouldn’t have smartphones or any other handheld devices. With nanoelectronics reaching the atomic scale, new plasma processing techniques for etching and deposition of materials are needed, while related developments in photovoltaics also require the processing of interfacial layers with atomic scale accuracy. In this course, the state-of-the-art of nanofabrication of integrated circuits, microelectromechanical systems (MEMS) and solar cells is described, with a focus on the role of plasmas in the materials processing