WIPO PUBLISHES PATENT OF ASML NETHERLANDS FOR "POSITIONING DEVICE, LITHOGRAPHIC APPARATUS, METHOD FOR COMPENSATING A BALANCE MASS TORQUE AND DEVICE MANUFACTURING METHOD" (DUTCH INVENTORS)

Press/Media: Expert Comment

Period17 Jul 2019

Media coverage

1

Media coverage

  • TitleWIPO PUBLISHES PATENT OF ASML NETHERLANDS FOR "POSITIONING DEVICE, LITHOGRAPHIC APPARATUS, METHOD FOR COMPENSATING A BALANCE MASS TORQUE AND DEVICE MANUFACTURING METHOD" (DUTCH INVENTORS)
    Media name/outletUS Fed News
    CountryUnited States
    Date17/07/19
    PersonsHans Butler