WIPO PUBLISHES PATENT OF ASML NETHERLANDS FOR "OBJECT POSITIONING SYSTEM, CONTROL SYSTEM, LITHOGRAPHIC APPARATUS, OBJECT POSITIONING METHOD AND DEVICE MANUFACTURING METHOD" (DUTCH INVENTORS)

Press/Media: Expert Comment

Period14 Dec 2015

Media coverage

1

Media coverage

  • TitleWIPO PUBLISHES PATENT OF ASML NETHERLANDS FOR "OBJECT POSITIONING SYSTEM, CONTROL SYSTEM, LITHOGRAPHIC APPARATUS, OBJECT POSITIONING METHOD AND DEVICE MANUFACTURING METHOD" (DUTCH INVENTORS)
    Media name/outletUS Fed News
    CountryUnited States
    Date14/12/15
    PersonsHans Butler