WIPO PUBLISHES PATENT OF ASML NETHERLANDS FOR "BEARING DEVICE, MAGNETIC GRAVITY COMPENSATOR, VIBRATION ISOLATION SYSTEM, LITHOGRAPHIC APPARATUS, METHOD TO CONTROL A GRAVITY COMPENSATOR HAVING A NEGATIVE STIFFNESS AND SPRING" (DUTCH INVENTORS)

Press/Media: Expert Comment

Period24 Sep 2018

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1

Media coverage

  • TitleWIPO PUBLISHES PATENT OF ASML NETHERLANDS FOR "BEARING DEVICE, MAGNETIC GRAVITY COMPENSATOR, VIBRATION ISOLATION SYSTEM, LITHOGRAPHIC APPARATUS, METHOD TO CONTROL A GRAVITY COMPENSATOR HAVING A NEGATIVE STIFFNESS AND SPRING" (DUTCH INVENTORS)
    Media name/outletUS Fed News
    Country/TerritoryUnited States
    Date24/09/18
    PersonsHans Butler