US Patent Issued to ASML Netherlands on Oct. 11 for "Piezoelectric actuator, actuator system, substrate support, and lithographic apparatus including the actuator" (Dutch Inventors)

Press/Media: Expert Comment

Period	12 Oct 2022

Media coverage

Title	US Patent Issued to ASML Netherlands on Oct. 11 for "Piezoelectric actuator, actuator system, substrate support, and lithographic apparatus including the actuator" (Dutch Inventors)
Media name/outlet	US Fed News
Country/Territory	United States
Date	12/10/22
URL	metabase.moreover.com/noarticleurl?type=psh&lni=66KN-MT01-JDKC-R4D1-00000-00
Persons	Hans Butler