US Patent Issued to ASML Netherlands on Nov. 9 for "Pneumatic support device and lithographic apparatus with pneumatic support device" (Dutch Inventors)

Media coverage

• Title	US Patent Issued to ASML Netherlands on Nov. 9 for "Pneumatic support device and lithographic apparatus with pneumatic support device" (Dutch Inventors)
  Media name/outlet	US Fed News
  Country/Territory	United States
  Date	10/11/21
  Persons	Hans Butler