US Patent Issued to ASML Netherlands on June 8 for "Bearing device, magnetic gravity compensator, vibration isolation system, lithographic apparatus, and method to control a gravity compensator having a negative stiffness" (Dutch Inventors)

Press/Media: Expert Comment

Period9 Jun 2021

Media coverage

1

Media coverage

  • TitleUS Patent Issued to ASML Netherlands on June 8 for "Bearing device, magnetic gravity compensator, vibration isolation system, lithographic apparatus, and method to control a gravity compensator having a negative stiffness" (Dutch Inventors)
    Media name/outletUS Fed News
    Country/TerritoryUnited States
    Date9/06/21
    PersonsHans Butler