New Atomic Layer Deposition Study Findings Have Been Reported by Researchers at Aix-Marseille University (Conductive Tin Thin Films Grown By Plasma-enhanced Atomic Layer Deposition: Effects of N-sources and Thermal Treatments)

Media coverage

• Title	New Atomic Layer Deposition Study Findings Have Been Reported by Researchers at Aix-Marseille University (Conductive Tin Thin Films Grown By Plasma-enhanced Atomic Layer Deposition: Effects of N-sources and Thermal Treatments)
  Media name/outlet	Nanotech Daily
  Country/Territory	United States
  Date	2/05/23
  URL	ct.moreover.com/?a=50671323375&p=1gw&v=1&x=mDkEItVhXMyvb-24YTdoAA
  Persons	Clémence Badie