Workshop on Silicon Dry Processing for Nanoelectronics and Micromechanics, Eindhoven, the Netherlands

Activity: Talk or presentation types › Contributed talk › Scientific

Description

Atomic layer deposition (ALD) for crystalline Si photovoltaics: surface passivation by Al2O3

Period	27 Aug 2009
Event title	Workshop on Silicon Dry Processing for Nanoelectronics and Micromechanics, Eindhoven, the Netherlands
Event type	Conference