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University of Alabama, Tuscaloosa, USA
van de Sanden , M. C. M.
(Speaker)
Plasma & Materials Processing
Activity
:
Talk or presentation types
›
Contributed talk
›
Scientific
Description
PECVD of thin Films: The study of plasma-surface interaction by means of in situ plasma and film diagnostics
Period
6 May 2004
Event title
University of Alabama, Tuscaloosa, USA
Event type
Conference